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Confidence Interval for the Distance of two Micro/Nano Structures and Its Applications in Dimensional Metrology

Title	Confidence Interval for the Distance of two Micro/Nano Structures and Its Applications in Dimensional Metrology
Author info	Gejza Wimmer ... [et al.]
Author	Wimmer Gejza 1949- (25%) UMBFP10 - Katedra matematiky
Co-authors	Karovič Karol (25%) Witkovský Viktor (25%) Koening Reiner (25%)
Source document	Measurement 2011 : proceedings of the 8th international conference on measurement, Smolenice, April 27-30, 2011. S. 80-83. - Bratislava : Slovak Academy of Sciences, 2011 ; Measurement 2011 8th international conference on measurment
Note	Bibl.: s. 83
Keywords	dĺžkový komparátor konfidenčné intervaly length comparators dimensional metrology confidence intervals
Language	English
Country	Slovak Republic
systematics	51
Annotation	Navrhnutá je metóda určenia konfidenčných intervalov pre vzdialenosť dvoch mikro/nano štruktúr. Proposed is a method for determining the confidence interval for the distance of two micro/nano structures
Public work category	AFD
No. of Archival Copy	20536
Catal.org.	BB301 - Univerzitná knižnica Univerzity Mateja Bela v Banskej Bystrici
Database	xpca - PUBLIKAČNÁ ČINNOSŤ

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Number of the records: 1