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Confidence Interval for the Distance of two Micro/Nano Structures and Its Applications in Dimensional Metrology
Title Confidence Interval for the Distance of two Micro/Nano Structures and Its Applications in Dimensional Metrology Author info Gejza Wimmer ... [et al.] Author Wimmer Gejza 1949- (25%) UMBFP10 - Katedra matematiky
Co-authors Karovič Karol (25%)
Witkovský Viktor (25%)
Koening Reiner (25%)
Source document Measurement 2011 : proceedings of the 8th international conference on measurement, Smolenice, April 27-30, 2011. S. 80-83. - Bratislava : Slovak Academy of Sciences, 2011 ; Measurement 2011 8th international conference on measurment Note Bibl.: s. 83 Keywords dĺžkový komparátor konfidenčné intervaly length comparators dimensional metrology confidence intervals Language English Country Slovak Republic systematics 51 Annotation Navrhnutá je metóda určenia konfidenčných intervalov pre vzdialenosť dvoch mikro/nano štruktúr. Proposed is a method for determining the confidence interval for the distance of two micro/nano structures Public work category AFD No. of Archival Copy 20536 Catal.org. BB301 - Univerzitná knižnica Univerzity Mateja Bela v Banskej Bystrici Database xpca - PUBLIKAČNÁ ČINNOSŤ 
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