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Structural characterization of a lamellar W/Si multilayer grating.
Title Structural characterization of a lamellar W/Si multilayer grating. Author Jergel Matej 1954- SAVFYZIK - Fyzikálny ústav SAV SCOPUS RID ORCID Co-authors Mikulik P. Majková Eva 1950 SAVFYZIK - Fyzikálny ústav SAV ORCID Senderák Rudolf 1953 SAVFYZIK - Fyzikálny ústav SAV Pinčík Emil 1956 SAVFYZIK - Fyzikálny ústav SAV ORCID Brunel M. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID Source document Journal of Applied Physics. Vol. 85, no. 2 (1999), p. 1225-1227 Language eng - English Country US - United States of America Document kind rozpis článkov z periodík (rbx) Citations IRZHAK, D. V. - KNYASEV, M. A. - PUNEGOV, V. I. - ROSHCHUPKIN, D. V. X-ray diffraction by phase diffraction gratings. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 1600-5767, 2015, vol. 48, pp. 1159-1164. PERSHIN, Yu P. - DEVIZENKO, A. Yu - KONDRATENKO, V. V. - MODROW, H. - HORMES, F. J. Structural and X-ray-optical characteristics of the W/Si multilayer X-ray mirrors. In Metallofizika i Noveishie Tekhnologii. ISSN 10241809, 2016-01-01, 38, 3, pp. 367-388. PFLUEGER, Mika - SOLTWISCH, Victor - PROBST, Juergen - SCHOLZE, Frank - KRUMREY, Michael. Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. In IUCRJ. ISSN 2052-2525, 2017, vol. 4, no., pp. 431-438. SOLTWISCH, Victor - LAUBIS, Christian - HERRERO, Analia Fernandez - et al. Investigating surface structures by EUV scattering. In EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VIII. ISSN 0277-786X, 2017, vol. 10143, UNSP 101430P. SOLTWISCH, Victor - HERRERO, Analia Fernandez - PFLUEGER, Mika - et al. Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 1600-5767, 2017, vol. 50, pp. 1524-1532, part 5. PUNEGOV, .V I. - PAVLOV, K. M. - KARPOV, A. V. - et al. Applications of dynamical theory of X-ray diffraction by perfect crystals to reciprocal space mapping. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 1600-5767, 2017, vol. 50, pp. 1256-1266, part 5. PASHAEV, E. M. - VASILIEV, A. L. - SUBBOTIN, I. A. - PRUTSKOV, G. - CHESNOKOV, Yu M. - KOVALCHUK, M. - ANTROPOV, N. O. - KRAVTSOV, E. A. - PROGLYADO, V. V. - USTINOV, V. V. Analysis of Structural Features of Periodic Fe/Pd/Gd/Pd Multilayered Systems. In CRYSTALLOGRAPHY REPORTS. ISSN 1063-7745, 2020, vol. 65, no. 6, pp. 985-994. HERRERO, Analia Fernandez - PFLUEGER, Mika - PULS, Jana - SCHOLZE, Frank - SOLTWISCH, Victor. Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. In OPTICS EXPRESS. ISSN 1094-4087, 2021, vol. 29, no. 22, pp. 35580-35591. Dostupné na: https://doi.org/10.1364/OE.430416. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1999 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1063/1.369346 
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rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 1999 1998 1.729
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