Field emission arrays by silicon micromachining

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Title	Field emission arrays by silicon micromachining
Author	Debski T.
Co-authors	Barth W.
	Shi F.
	Hudek Peter 1953- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Volland B.
	Voigt D.
	Rangelow I.W.
	Grabiec P.B.
	Zaborowski M.
	Mitura S.

Source document	12th International Vacuum Microelectronics Conference : Proceedings. - Darmstadt, Germany, 1999
Language	eng - English
Country	DE - Germany
Document kind	rozpis článkov z periodík (rzb)
Category	AFC - Published papers from foreign scientific conferences
Year	1999

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Number of the records: 1