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The Initial Stage of Plasma Anodic Oxidation of Silicon Through ZrO2 Overlayer
Title The Initial Stage of Plasma Anodic Oxidation of Silicon Through ZrO2 Overlayer Author Pinčík Emil 1956 SAVFYZIK - Fyzikálny ústav SAV ORCID Co-authors Bartoš Juraj Jergel Matej 1954- SAVFYZIK - Fyzikálny ústav SAV SCOPUS RID ORCID Chromik Štefan 1949 SAVELEK - Elektrotechnický ústav SAV ORCID Brunner Róbert 1954 SAVFYZIK - Fyzikálny ústav SAV Tucoulou R. Source document The Workshop on Solid State Surfaces and Interfaces II.. P. 52 Book of Extended Abstracts, June 20-22, 2000 / Brunner Róbert 1954. - Bratislava : FU SAV, 2000 Language eng - English Country SK - Slovak Republic Document kind rozpis článkov z periodík (rzb) Category AFG - Abstracts of papers from foreign conferences Year 2000 article
rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2000
Number of the records: 1