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Field emission arrays by silicon micromachining

  1. TitleField emission arrays by silicon micromachining
    Author Debski T.
    Co-authors Volland B.

    Barth W.

    Voigt J.

    Shi F.

    Hudek Peter 1953- SAVINFO - Ústav informatiky SAV    SCOPUS    RID    ORCID

    Rangelow I.W.

    Grabiec P.B.

    Zaborowski M.

    Mitura S.

    Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 896-899
    Languageeng - English
    Document kindrozpis článkov z periodík (rbx)
    CitationsRESNIK, D - VRTACNIK, D - ALJANCIC, U - MOZEK, M - AMON, S. Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon. In MICROELECTRONICS JOURNAL. ISSN 0026-2692, 2003, vol. 34, no. 5-8, pp. 591.
    XU, NS - HUQ, SE. Novel cold cathode materials and applications. In MATERIALS SCIENCE & ENGINEERING R-REPORTS. ISSN 0927-796X, 2005, vol. 48, no. 2-5, pp. 47.
    BARROS, A. L. - LOPES, A. T. - CARREÑO, M. N P. Silicon microtips with self-aligned integrated electrodes. In ECS Transactions. ISSN 19385862, 2007-12-01, 9, 1, pp. 473-480.
    BURT, D. P. - DOBSON, P. S. - DONALDSON, L. - WEAVER, J. M. R. A simple method for high yield fabrication of sharp silicon tips. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2008, vol. 85, no. 3, pp. 625.
    HO, Justin - ONO, Takahito - TSAI, Ching-Hsiang - ESASHI, Masayoshi. Photolithographic fabrication of gated self-aligned parallel electron beam emitters with a single-stranded carbon nanotube. In NANOTECHNOLOGY. ISSN 0957-4484, 2008, vol. 19, no. 36, pp.
    KOROTCENKOV, G. - CHO, B. Porous silicon and cold cathodes. In Porous Silicon: From Formation to Applications: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three. ISBN 978-1-4822-6459-3, 2016, pp. 165-181.
    CategoryADC
    Year2000
    Registered inWOS
    Registered inSCOPUS
    Registered inCCC
    DOI 10.1116/1.591293
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    A
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    200019991.690
Number of the records: 1  

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