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Field emission arrays by silicon micromachining
Title Field emission arrays by silicon micromachining Author Debski T. Co-authors Volland B. Barth W. Voigt J. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Rangelow I.W. Grabiec P.B. Zaborowski M. Mitura S. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 896-899 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations RESNIK, D - VRTACNIK, D - ALJANCIC, U - MOZEK, M - AMON, S. Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon. In MICROELECTRONICS JOURNAL. ISSN 0026-2692, 2003, vol. 34, no. 5-8, pp. 591. XU, NS - HUQ, SE. Novel cold cathode materials and applications. In MATERIALS SCIENCE & ENGINEERING R-REPORTS. ISSN 0927-796X, 2005, vol. 48, no. 2-5, pp. 47. BARROS, A. L. - LOPES, A. T. - CARREÑO, M. N P. Silicon microtips with self-aligned integrated electrodes. In ECS Transactions. ISSN 19385862, 2007-12-01, 9, 1, pp. 473-480. BURT, D. P. - DOBSON, P. S. - DONALDSON, L. - WEAVER, J. M. R. A simple method for high yield fabrication of sharp silicon tips. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2008, vol. 85, no. 3, pp. 625. HO, Justin - ONO, Takahito - TSAI, Ching-Hsiang - ESASHI, Masayoshi. Photolithographic fabrication of gated self-aligned parallel electron beam emitters with a single-stranded carbon nanotube. In NANOTECHNOLOGY. ISSN 0957-4484, 2008, vol. 19, no. 36, pp. KOROTCENKOV, G. - CHO, B. Porous silicon and cold cathodes. In Porous Silicon: From Formation to Applications: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three. ISBN 978-1-4822-6459-3, 2016, pp. 165-181. Category ADC Year 2000 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1116/1.591293 article
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2000 1999 1.690
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