Number of the records: 1
Progress on nanostructuring with NANOJET
Title Progress on nanostructuring with NANOJET Author Voigt J. Co-authors Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Rangelow I.W. Edinger K. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 3525-3529 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations POGGI, MA - BOTTOMLEY, LA - LILLEHEI, PT. Scanning probe microscopy. In ANALYTICAL CHEMISTRY. ISSN 0003-2700, 2002, vol. 74, no. 12, pp. 2851. OKUMURA, T - SAITOH, M - YASHIRO, Y - KIMURA, T. Fine pattern etching of molybdenum thin film and silicon substrate by using atmospheric line-shaped microplasma source. In JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS. ISSN 0021-4922, 2003, vol. 42, no. 6B, pp. 3995. SCHENKEL, T - PERSAUD, A - PARK, SJ - NILSSON, J - BOKOR, J - LIDDLE, JA - KELLER, R - SCHNEIDER, DH - CHENG, DW - HUMPHRIES, DE. Solid state quantum computer development in silicon with single ion implantation. In JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, 2003, vol. 94, no. 11, pp. 7017. OKUMURA, T - SAITOH, M - YASHIRO, Y - KIMURA, T. Fine pattern etching of molybdenum thin film and silicon substrate by using atmospheric line-shaped microplasma source. In JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS. ISSN 0021-4922, 2003, vol. 42, no. 6B, pp. 3995. XIE, DZ - NGOI, BKA - ZHOU, W - FU, YQ. Fabrication and thermal annealing behavior of nanoscale ripple fabricated by focused ion beam. In APPLIED SURFACE SCIENCE. ISSN 0169-4332, 2004, vol. 227, no. 1-4, pp. 250. ZHANG, LB - SHI, JX - YUAN, JL - JI, SM - CHANG, M. The advancement of SPM-based nanolithography. In ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY. ISSN 0255-5476, 2004, vol. 471-472, no., pp. 353-357. SILMY, K - HOLLANDER, A - DILLMANN, A - THOMEL, J. Micro-jet plasma CVD with HMDSO/O-2. In SURFACE & COATINGS TECHNOLOGY. ISSN 0257-8972, 2005, vol. 200, no. 1-4, pp. 368. NAIK, Nisarga - COURCIMAULT, Christophe - HUNTER, Hanif - BERG, John - LEE, Jungchul - NAELI, Kianoush - WRIGHT, Tanya - ALLEN, Mark - BRAND, Oliver - GLEZER, Ari - KING, Bill. Fabrication and characterization of liquid and gaseous micro-and nanojets. In Micro-Electro-Mechanical Systems 2005, 2005, vol. 7, no., pp. 731-736. NAIK, Nisarga - COURCIMAULT, Christophe - HUNTER, Hanif - BERG, John - LEE, Jungchul - NAELI, Kianoush - WRIGHT, Tanya - ALLEN, Mark - BRAND, Oliver - GLEZER, Ari - KING, William. Microfluidics for generation and characterization of liquid and gaseous micro- and nanojets. In SENSORS AND ACTUATORS A-PHYSICAL. ISSN 0924-4247, 2007, vol. 134, no. 1, pp. 119. HANASAKI, Itsuo - YONEBAYASHI, Toru - KAWANO, Satoyuki. Molecular dynamics of a water jet from a carbon nanotube. In PHYSICAL REVIEW E. ISSN 1539-3755, 2009, vol. 79, no. 4, pp. HANASAKI, Itsuo - YONEBAYASHI, Toru - KAWANO, Satoyuki. Molecular dynamics of a water jet from a carbon nanotube. In PHYSICAL REVIEW E. ISSN 1539-3755, 2009, vol. 79, no. 4, pp. XIANG, Wei Wei - WEN, Li - WANG, Hai - ZHANG, Qiu Ping - CHU, Jia Ru. Fabrication of cantilever arrays with nano-aperture hollow tips for parallel microplasma etching. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2010, vol. 87, no. 12, pp. 2475. Category ADC Year 2000 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1116/1.1319823 
article
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2000 1999 1.690
Number of the records: 1