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Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers- X-ray comparative study

  1. TitleEffect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers- X-ray comparative study
    Author Anopchenko A.S. SAVFYZIK - Fyzikálny ústav SAV
    Co-authors Jergel Matej 1954- SAVFYZIK - Fyzikálny ústav SAV    SCOPUS    RID    ORCID

    Majková Eva 1950 SAVFYZIK - Fyzikálny ústav SAV    ORCID

    Luby Štefan 1941 SAVFYZIK - Fyzikálny ústav SAV

    Holý V.

    Aschentrup A.

    Kolina I.

    Cheon Lim Y.

    Haindl G.

    Kleineberg U.

    Heinzmann U.

    Source document Physica B : condensed matter. Vol. 305, no. 1 (2001), p. 14-20
    Languageeng - English
    Document kindrozpis článkov z periodík (rbx)
    CategoryADC
    Year2001
    article

    article

    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    200120000.893
Number of the records: 1  

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