Structural investigations of the C49-C54 transformation in TiSi2 thin films

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Title	Structural investigations of the C49-C54 transformation in TiSi2 thin films
Author	Chenevier B.
Co-authors	Chaix-Pluchery O.
	Maťko Igor 1963 SAVFYZIK - Fyzikálny ústav SAV ^SCOPUS ^ORCID
	Madar R.
	La Via F.

Source document	Microelectronic Engineering. Vol. 55, no. 1-4 (2001), p. 115-122
Language	eng - English
Document kind	rozpis článkov z periodík (rbx)
Category	ADC
Year	2001

article

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2001

Number of the records: 1