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Preparation of patterned GaAs structures for MEMS an MOEMS
Title Preparation of patterned GaAs structures for MEMS an MOEMS Author Cambel Vladimír 1956 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Kičin Slavomír SAVELEK - Elektrotechnický ústav SAV Kuliffayová Marta Kováčová Eva 1966 SAVELEK - Elektrotechnický ústav SAV Novák Jozef 1951 SAVELEK - Elektrotechnický ústav SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Förster A. Source document Materials Science and Engineering C - Biomimetic and Supramolecular Systems. Vol. 19 (2002), p. 161-165 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations PIRZADA, Daniel - TRIVEDI, Pankaj - FIELD, David - CHENG, Gary J. Effect of film thickness and laser energy density on the microstructure of a-GaAs films after excimer laser crystallization. In JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, 2007, vol. 102, no. 1, pp. GOPAL, M. A study of the mechanical properties of indium phosphide (InP) based MEMS structures. Master's Thesis, National University of Singapore. 2008, 176 p. JIANG, Shanchao - WANG, Jing - SUI, Qingmei - YE, Qinglin. Low-Cost Plate-Type MOEMS Uniaxial Vibration Sensor Based on Metal Etching and Fiber Collimator Technique. In IEEE SENSORS JOURNAL. ISSN 1530-437X, 2016, vol. 16, no. 12, pp. 4816-4821. Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2002 Registered in SCOPUS DOI 10.1016/S0928-4931(01)00476-3 
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