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Low temperature plasma deposition of N-doped a-SiC:H films and annealed by pulsed electron beam
Title Low temperature plasma deposition of N-doped a-SiC:H films and annealed by pulsed electron beam Author 1955 Huran Jozef SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Hotový I. Kobzev A.P. Balalykin Nikolay I. Source document . P. 401 Proceedings of the 16th International Symposium on Plasma Chemistry. - Taormina, 2003 Language eng - English Country IT - Italy Document kind rozpis článkov z periodík (rzb) Citations CHOUKOUROV, A. - GRINEVICH, A. - HANUS, J. - KOUSAL, J. - SLAVINSKA, D. - BIEDERMAN, H. - BOWERS, A. - HANLEY, L. In THIN SOLID FILMS. APR 28 2006, vol. 502, no. 1-2, p. 40-43. Category AEE - Scientific papers in foreign non peer-reviewed proceedings, monographs Category of document (from 2022) O2 - Odborný výstup publikačnej činnosti ako časť knižnej publikácie alebo zborníka Type of document príspevok Year 2003 
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rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2003
Number of the records: 1