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Advanced patterning techniques for nanodevice fabrication
Title Advanced patterning techniques for nanodevice fabrication Author 1955- Kostič Ivan SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Co-authors 1973- Andok Robert SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID 1948- Barák Vladislav SAVINFO - Ústav informatiky SAV SCOPUS RID 1948 Čaplovič Igor SAVINFO - Ústav informatiky SAV RID 1955- Konečníková Anna SAVINFO - Ústav informatiky SAV SCOPUS RID Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV SCOPUS RID Hrkút Pavol 1948- SAVINFO - Ústav informatiky SAV SCOPUS RID Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV SCOPUS RID Source document Journal of Materials Science. Vol. 14 (2003), s. 645-648. - London : Chapman and Hall Language eng - English Country GB - Great Britian Document kind rozpis článkov z periodík (rbx) Citations CHEN, MS - BRANDOW, SL - SCHULL, TL - CHRISEY, DB - DRESSICK, WJ. A non-covalent approach for depositing spatially selective materials on surfaces. In ADVANCED FUNCTIONAL MATERIALS. ISSN 1616-301X, 2005, vol. 15, no. 8, pp. 1364-1375. BIN MADNASRI, Sutikno - HASHIM, U. - JAMAL, Z. A. Z. Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication. In JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS. ISSN 0957-4522, 2007, vol. 18, no. 12, pp. 1191-1195. HASHIM, U. - SUTIKNO - JAMAL, Z. A Z. Designing of masks for quantum dot single electron transistor fabrication using E-beam nanolithography. In 2007 NSTI Nanotechnology Conference and Trade Show NSTI Nanotech 2007, Technical Proceedings, 2007-08-23, 4, pp. 434-437. NABITY, Joe - COMPBELL, Lesely Anglin - ZHU, Mo - ZHOU, Weilie. E-beam nanolithography integrated with scanning electron microscope. In Scanning Microscopy for Nanotechnology: Techniques and Applications, 2007-12-01, pp. 120-151. ZHANG, Y. et al. Method of patterning and product(s) obtained therefrom. United States Patent No. 12/298504. LEE, Kyoung Nam - KIM, Kyoung Seob - KIM, Nam-Hoon - ROH, Yonghan. Fabrication of SiO2 nano-dots by block copolymer lithography and liquid phase deposition. In MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY. ISSN 0921-5107, 2008, vol. 147, no. 2-3, pp. 209-212. KIM, Youngsang - JEONG, Heejun. Characteristics of negative electron beam resists, ma-N2410 and ma-N2405. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2008, vol. 85, no. 3, pp. 582-586. HEDHILI, M. N. - YAKSHINSKIY, B. V. - WASIELEWSKI, R. - CISZEWSKI, A. - MADEY, T. E. Adsorption and electron-induced polymerization of methyl methacrylate on Ru(1010). In JOURNAL OF CHEMICAL PHYSICS. ISSN 0021-9606, 2008, vol. 128, no. 17, pp. ALAM, Md Mahbub - LEE, Yu-Rim - KIM, Jin-Yeol - JUNG, Woo-Gwang. Fabrication of nanopatterns using block copolymer and controlling surface morphology. In JOURNAL OF COLLOID AND INTERFACE SCIENCE. ISSN 0021-9797, 2010, vol. 348, no. 1, pp. 206-210. PLATH, N. Nano- und Mikronanostrukturen zur Untersuchung und nanotechnologischen Anwendung von Motorproteinen. 2011, 150 p. HASHIM, U. - MADNASRI, S. - JAMAL, Z.A.Z. Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography. In International Journal Nanoelectronics and Materials. 2011, no. 4, pp. 85-91. ZHANG, Y. - LU, M. Method of patterning and product (s) obtained therefrom. 2012, United States Patent no. 8241539 B2. LI, Xiangyu - OU, Fang - HUANG, Yingyan - HO, Seng-Tiong. Micro-resonator loss computation using conformal transformation and active-lasing FDTD approach and applications to tangential/radial output waveguide optimization I: Analytical approach. In OPTICS COMMUNICATIONS. ISSN 0030-4018, 2013, vol. 291, no., pp. 435. LI, Yang - HONG, Minghui. Parallel Laser Micro/Nano-Processing for Functional Device Fabrication. In LASER & PHOTONICS REVIEWS. ISSN 1863-8880, 2020, vol. 14, no. 3, pp. ZERAATI, Malihe - ARSHADIZADEH, Razieh - CHAUHAN, Narendra Pal Singh - SARGAZI, Ghasem. Genetic algorithm optimization of magnetic properties of Fe-Co-Ni nanostructure alloys prepared by the mechanical alloying by using multi-objective artificial neural networks for the core of transformer. In MATERIALS TODAY COMMUNICATIONS, 2021, vol. 28, no., pp. Category ADMA - Scientific papers in foreign impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2003 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1023/A:1026198130745 
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