New results of low temperature PECVD amorphous silicon carbide

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Title	New results of low temperature PECVD amorphous silicon carbide
Author	Huran Jozef 1955 SAVELEK - Elektrotechnický ústav SAV ^ORCID
Co-authors	Hotový I.
	Kobzev A.P.
	Balalykin Nikolay I.

Source document	. P. 123-126 ASDAM 2004 : conference proceeding of the Fifth International Conference on Advanced Semiconductor Devices and Microsystems. Smolenice Castle, Slovakia October 17-21, 2004. - Piscataway : IEEE, 2004 / Osvald Jozef 1953 ; Haščík Štefan 1956
Language	eng - English
Country	US - United States of America
Document kind	rozpis článkov z periodík (rzb)
Category	AEC - Scientific papers in foreign peer-reviewed proceedings, monographs
Category of document (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Type of document	príspevok
Year	2004

article

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2004

Number of the records: 1