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2-D thermo-mechanical simulation of the membrane MEMS components

  1. Title2-D thermo-mechanical simulation of the membrane MEMS components
    Author Chlpík J.
    Co-authors Držík Milan SAVSTAV - Ústav stavebníctva a architektúry SAV

    Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV

    Source document . P. 319-322 ASDAM 2004 : conference proceeding of the Fifth International Conference on Advanced Semiconductor Devices and Microsystems. Smolenice Castle, Slovakia October 17-21, 2004. - Piscataway : IEEE, 2004 / Osvald Jozef 1953 ; Haščík Štefan 1956
    Languageeng - English
    CountryUS - United States of America
    Document kindrozpis článkov z periodík (rzb)
    CategoryAEC - Scientific papers in foreign peer-reviewed proceedings, monographs
    Category of document (from 2022)V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
    Type of documentpríspevok
    Year2004
    article

    article

    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    2004
Number of the records: 1  

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