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Technology related issues regarding fabrication of AlGaN/GaN-based MOSHFETs with GdScO3 as dielectric

  1. TitleTechnology related issues regarding fabrication of AlGaN/GaN-based MOSHFETs with GdScO3 as dielectric
    Author Heidelberg G.
    Co-authors Roeckerath M.

    Steins R.

    Stefaniak M.

    Fox A.

    Schubert J.

    Kaluza N.

    Marso M.

    Lüth Hans

    Kordoš Peter SAVELEK - Elektrotechnický ústav SAV

    Source document ASDAM 2006 : proceedings of the 6th International Conference on Advanced Semiconductor Devices and Microsystems. P. 241-244. - Piscataway : IEEE, 2006 / Breza J. ; Donoval D. ; Vavrinský E.
    Languageeng - English
    CountryUS - United States of America
    Document kindrozpis článkov z periodík (rzb)
    CategoryAEC - Scientific papers in foreign peer-reviewed proceedings, monographs
    Category of document (from 2022)V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
    Type of documentpríspevok
    Year2006
    article

    article

    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    2006
Number of the records: 1  

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