Number of the records: 1
2D and 3D growth of Ru/RuO2 metal layers with atomic vapour deposition
Title 2D and 3D growth of Ru/RuO2 metal layers with atomic vapour deposition Author Manke C. Co-authors Boissiere O. Weber U. Barbar G. Baumann P.K. Lindner J. Ťapajna Milan 1977 SAVELEK - Elektrotechnický ústav SAV ORCID Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV ORCID Source document Microelectronic Engineering. Vol. 83, (2006), p. 2277. - Amsterdam : Elsevier Science Publishers Language eng - English Country NL - Netherlands Document kind rozpis článkov z periodík (rbx) Citations Li, Z. Schram, T. Pantisano, L. Conard, T. Van Elshocht, S. Deweerd, W. De Gendt, S. De Meyer, K. Stesmans, A. Shamuilia, S. Afanas'ev, V. V. Akheyar, A. Brunco, D. P. Yamada, N. Lehnen, P. JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, FEB 1 2007, vol. 101, no. 3. VASILYEV, V. - CHUNG, S.H. - SONG, Y.W. In SOLID STATE TECHNOLOGY. ISSN 0038-111X, AUG 2007, vol. 50, no. 8, p. 53-+. LUKOSIUS, M. - WENGER, C. - PASKO, S. - MUSSIG, H.J. - SEITZINGER, B. - LOHE, C. In CHEMICAL VAPOR DEPOSITION. JUN 2008, vol. 14, no. 5-6, p. 123-128. KUKLI, K. - RITALA, M. - KEMELL, M. - LESKELA, M. In JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 2010, vol. 157, no. 1, p. D35-D40. CHOI, C. - ANDO, T. - NARAYANAN, V. In APPLIED PHYSICS LETTERS. FEB 21 2011, vol. 98, no. 8. SALAUN, A. - TROMMER, J. - NEWCOMB, S.B. - POVEY, I.M. - SALAUN, M. - KEENEY, L. - O'MAHONY, A. - PEMBLE, M.E. In CHEMICAL VAPOR DEPOSITION. JUN 2011, vol. 17, no. 4-6, p. 114-122. HONG, T.E. - CHOI, S.H. - YEO, S. - PARK, J.Y. - KIM, S.H. - CHEON, T. - KIM, H. - KIM, M.K. - KIM, H. In ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 2013, vol. 2, no. 3, p. P47-P53. VASILYEV, V.Y. - MOROZOVA, N.B. - IGUMENOV, I.K. In RUSSIAN CHEMICAL REVIEWS. 2014, vol. 83, no. 8, p. 758-782. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2006 
article
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2006 2005 1.347 Q1 0.952 Q1
Number of the records: 1