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PECVD silicon carbide deposited at different temperatures

  1. TitlePECVD silicon carbide deposited at different temperatures
    Author Huran Jozef 1955 SAVELEK - Elektrotechnický ústav SAV    ORCID
    Co-authors Zaťko Bohumír 1973 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Hotový I.

    Petzold J.

    Kobzev A.P.

    Balalykin Nikolay I.

    Source document Czechoslovak journal of physics B. Vol. 56, (2006), p. S1207-S1211. - Praha : Academia
    Languageeng - English
    CountryCZ - Czech Republic
    Document kindrozpis článkov z periodík (rbx)
    CitationsHONG, R.D. - HUANG, J. - CHEN, X.P. - ZHOU, Y. - LIU, D.Y. - WU, Z.Y. In SPECTROSCOPY LETTERS. 2010, vol. 43, no. 4, p. 298-305.
    CHENG, C.H. - WU, C.L. - CHEN, C.C. - TSAI, L.H. - LIN, Y.H. - LIN, G.R. In IEEE PHOTONICS JOURNAL. OCT 2012, vol. 4, no. 5, p. 1762-1775.
    CategoryADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2006
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    A
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    200620050.360Q40.240Q3
Number of the records: 1  

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