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Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition
Title Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition Author Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Lupták Roman SAVELEK - Elektrotechnický ústav SAV Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV ORCID Hušeková Kristína 1957 SAVELEK - Elektrotechnický ústav SAV Čičo Karol SAVELEK - Elektrotechnický ústav SAV Rosová Alica 1962 SAVELEK - Elektrotechnický ústav SAV ORCID Lukocius M. Abrutis A. Písečný Pavol SAVINFO - Ústav informatiky SAV Espinos J.P. Issue data Elsevier Source document Materials science in semiconductor processing. Vol. 9 (2006), p.1065-1072 Language eng - English Country NL - Netherlands Document kind rozpis článkov z periodík (rbx) Citations LIBRALESSO, L. Characterization of the interface of high-k praseodymium oxide thin films on silicon surfaces. PhD Thesis, Université Joseph Fourier - Grenoble 1. 2006, 207 p. KUKLI, Kaupo - HATANPAA, Timo - RITALA, Mikko - LESKELA, Markku. Atomic layer deposition of gadolinium oxide films. In CHEMICAL VAPOR DEPOSITION. ISSN 0948-1907, 2007, vol. 13, no. 10, pp. 546-552. DABROWSKI, J. - LIPPERT, G. - OBERBECK, L. - SCHROEDER, U. - COSTINA, I. - LUPINA, G. - RATZKE, M. - ZAUMSEIL, P. - MUESSIG, H.J. Morphology and composition of selected high-k materials and their relevance to dielectric properties of thin films. In JOURNAL OF THE ELECTROCHEMICAL SOCIETY. ISSN 0013-4651, 2008, vol. 155, no. 5, pp. G97-G114. ABRUTIS, A. - LUKOSIUS, M. - SALTYTE, Z. - GALVELIS, R. - BAUMANN, P. K. - SCHUMACHER, M. - LINDNER, J. Chemical vapour deposition of praseodymium oxide films on silicon: influence of temperature and oxygen pressure. In THIN SOLID FILMS. ISSN 0040-6090, 2008, vol. 516, no. 15, pp. 4758-4764. LOSURDO, Maria - GIANGREGORIO, Maria M. - CAPEZZUTO, Pio - BRUNO, Giovanni - MALANDRINO, Graziella - FRAGALA, Ignazio L. - ARMELAO, Lidia - BARRECA, Davide - TONDELLO, Eugenio. Structural and optical properties of nanocrystalline Er(2)O(3) thin films deposited by a versatile low-pressure MOCVD approach. In JOURNAL OF THE ELECTROCHEMICAL SOCIETY. ISSN 0013-4651, 2008, vol. 155, no. 2, pp. G44-G50. LI, M. - HUANG, F.X. - LI S.S. - WANG, Z. - YIN, P. Research and development of silver-based electrical contact materials with rare earth. In Electrical Engineering Materials. 2009, no. 3, pp. 30-35. GEPPERT, I. - EIZENBERG, M. - BOJARCZUK, N. A. - EDGE, L. F. - COPEL, M. - GUHA, S. Investigation of band gap, band alignment and bonding states of the (TbxSc1-x)(2)O-3/Si system. In ADVANCED GATE STACK, SOURCE/DRAIN, AND CHANNEL ENGINEERING FOR SI-BASED CMOS 6: NEW MATERIALS, PROCESSES, AND EQUIPMENT. ISSN 1938-5862, 2010, vol. 28, no. 1, pp. 191-199. FERREIRA, Ana C. - FERRARIA, A. M. - BOTELHO DO REGO, A. M. - GONCALVES, Antonio P. - CORREIA, M. Rosario - GASCHE, T. Almeida - BRANCO, Joaquim B. Partial oxidation of methane over bimetallic nickel-lanthanide oxides. In JOURNAL OF ALLOYS AND COMPOUNDS. ISSN 0925-8388, 2010, vol. 489, no. 1, pp. 316-323. MILANOV, Andrian P. - TOADER, Teodor - PARALA, Harish - BARRECA, Davide - GASPAROTTO, Alberto - BOCK, Claudia - BECKER, Hans-Werner - NGWASHI, Divine K. - CROSS, Richard - PAUL, Shashi - KUNZE, Ulrich - FISCHER, Roland A. - DEVI, Anjana. Lanthanide Oxide Thin Films by Metalorganic Chemical Vapor Deposition Employing Volatile Guanidinate Precursors. In CHEMISTRY OF MATERIALS. ISSN 0897-4756, 2009, vol. 21, no. 22, pp. 5443-5455. MILANOV, A. P. - THIEDE, T. - HELLWIG, M. - PARALA, H. - BOCK, C. - BECKER, H.W. - NGWASHI, D. K. - CROSS, R. B. M. - PAUL, S. - KUNZE, U. - FISCHER, R. A. - DEVI, A. Rare-Earth Based Oxide and Nitride Thin Films Employing Volatile Homoleptic Guanidinate Precursors. In EUROCVD 17 / CVD 17. ISSN 1938-5862, 2009, vol. 25, no. 8, pp. 143-150. GEPPERT, I. - EIZENBERG, M. - BOJARCZUK, N. A. - EDGE, L. F. - COPEL, M. - GUHA, S. Determination of band offsets, chemical bonding, and microstructure of the (TbxSc1-x)(2)O-3/Si system. In JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, 2010, vol. 108, no. 2, pp. AHREN, Maria - SELEGARD, Linnea - SODERLIND, Fredrik - LINARES, Mathieu - KAUCZOR, Joanna - NORMAN, Patrick - KALL, Per-Olov - UVDAL, Kajsa. A simple polyol-free synthesis route to Gd2O3 nanoparticles for MRI applications: an experimental and theoretical study. In JOURNAL OF NANOPARTICLE RESEARCH. ISSN 1388-0764, 2012, vol. 14, no. 8, pp. DALY, Scott R. - KIM, Do Young - GIROLAMI, Gregory S. Lanthanide N,N-Dimethylaminodiboranates as a New Class of Highly Volatile Chemical Vapor Deposition Precursors. In INORGANIC CHEMISTRY. ISSN 0020-1669, 2012, vol. 51, no. 13, pp. 7050-7065. HUANG, Liu-Ying - LI, Ai-Dong - FU, Ying-Ying - ZHANG, Wen-Qi - LIU, Xiao-Jie - WU, Di. Characteristics of Gd2-xLaxO3 high-k films by metal-organic chemical vapor deposition. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2012, vol. 94, no., pp. 38-43. BARQUINHA, Pedro - MARTINS, Rodrigo - PEREIRA, Luis - FORTUNATO, Elvira. Transparent Oxide Electronics: From Materials to Devices. In Transparent Oxide Electronics: From Materials to Devices, 2012-03-15, pp. 101-153. FAN, Xiaojiao - LIU, Hongxia - FEI, Chenxi. Effect of post-deposition annealing on the interfacial chemical bonding states and band alignment of atomic layer deposited neodymium oxide on silicon. In MATERIALS RESEARCH EXPRESS. ISSN 2053-1591, 2014, vol. 1, no. 4, pp. ZHUANG, Jiaqing - SUN, Qi-Jun - ZHOU, Ye - HAN, Su-Ting - ZHOU, Li - YAN, Yan - PENG, Haiyan - VENKATESH, Shishir - WU, Wei - LI, Robert K. Y. - ROY, V. A. L. Solution-Processed Rare-Earth Oxide Thin Films for Alternative Gate Dielectric Application. In ACS APPLIED MATERIALS & INTERFACES. ISSN 1944-8244, 2016, vol. 8, no. 45, pp. 31128-31135. WATKINSON, E. J. - AMBROSI, R. M. - WILLIAMS, H. R. - SARSFIELD, M. J. - STEPHENSON, K. - WESTON, D. P. - MARSH, N. - HAIDON, C. Cerium neodymium oxide solid solution synthesis as a potential analogue for substoichiometric AmO2 for radioisotope power systems. In JOURNAL OF NUCLEAR MATERIALS. ISSN 0022-3115, 2017, vol. 486, no., pp. 308-322. GOH, Kian Heng - HASEEB, A. S. M. A. - WONG, Yew Hoong. Lanthanide rare earth oxide thin film as an alternative gate oxide. In MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. ISSN 1369-8001, 2017, vol. 68, no., pp. 302-315. HETHERIN, Karuppiah - RAMESH, S. - WONG, Yew Hoong. Effects of thermal oxidation duration on the structural and electrical properties of Nd2O3/Si system. In APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. ISSN 0947-8396, 2017, vol. 123, no. 8, pp. HETHERIN, Karuppiah - RAMESH, S. - WONG, Yew Hoong. Formation of neodymium oxide by thermal oxidation of sputtered Nd thin film on Si substrate. In JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS. ISSN 0957-4522, 2017, vol. 28, no. 16, pp. 11994-12003. MORKOC, B. - KAHRAMAN, A. - YILMAZ, E. Effects of the oxide/interface traps on the electrical characteristics in Al/Yb2O3/SiO2/n-Si/Al MOS capacitors. In JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS. ISSN 0957-4522, APR 2021, vol. 32, no. 7, p. 9231-9243. MORKOC, Berk - KAHRAMAN, Aysegul - YILMAZ, Ercan. Post-deposition annealing effect on the structural and electrical properties of Ytterbium oxide as an alternative gate dielectric. In MATERIALS CHEMISTRY AND PHYSICS, 2022, vol. 292, no., pp. ISSN 0254-0584. Dostupné na: https://doi.org/10.1016/j.matchemphys.2022.126875. AHMAD, Javed - WAHAB, Rizwan - SIDDIQUI, Maqsood A. - FARSHORI, Nida Nayyar - SAQUIB, Quaiser - AHMAD, Naushad - AL-KHEDHAIRY, Abdulaziz A. Neodymium oxide nanostructures and their cytotoxic evaluation in human cancer cells. In JOURNAL OF TRACE ELEMENTS IN MEDICINE AND BIOLOGY, 2022, vol. 73, no., pp. ISSN 0946-672X. Dostupné na: https://doi.org/10.1016/j.jtemb.2022.127029. AL-ESAIFER, Husam Raed Sabeeh - AKTAG, Aliekber - NAYEF, Uday Muhsin - DOGANCI, Emre. Optical-electrical characteristics of Al/Gd2O3/(CZ-pSi)/Al diodes under gamma ray irradiation. In RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2022, vol. 177, no. 7-8, pp. 783-799. ISSN 1042-0150. Dostupné na: https://doi.org/10.1080/10420150.2022.2077204. SAWKA, Agata. MOCVD growth of gadolinium oxide layers on tubes. In Ceramics International, 2023-07-15, 49, 14, pp. 23835-23843. ISSN 02728842. Dostupné na: https://doi.org/10.1016/j.ceramint.2023.04.224. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2006 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1016/j.mssp.2006.10.025 
article
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2006 2005 0.884 Q2 0.554 Q2
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