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Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition

  1. TitleCharacterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition
    Author Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV    ORCID
    Co-authors Lupták Roman SAVELEK - Elektrotechnický ústav SAV

    Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Hušeková Kristína 1957 SAVELEK - Elektrotechnický ústav SAV

    Čičo Karol SAVELEK - Elektrotechnický ústav SAV

    Rosová Alica 1962 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Lukocius M.

    Abrutis A.

    Písečný Pavol SAVINFO - Ústav informatiky SAV

    Espinos J.P.

    Issue dataElsevier
    Source document Materials science in semiconductor processing. Vol. 9 (2006), p.1065-1072
    Languageeng - English
    CountryNL - Netherlands
    Document kindrozpis článkov z periodík (rbx)
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    ABRUTIS, A. - LUKOSIUS, M. - SALTYTE, Z. - GALVELIS, R. - BAUMANN, P. K. - SCHUMACHER, M. - LINDNER, J. Chemical vapour deposition of praseodymium oxide films on silicon: influence of temperature and oxygen pressure. In THIN SOLID FILMS. ISSN 0040-6090, 2008, vol. 516, no. 15, pp. 4758-4764.
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    FERREIRA, Ana C. - FERRARIA, A. M. - BOTELHO DO REGO, A. M. - GONCALVES, Antonio P. - CORREIA, M. Rosario - GASCHE, T. Almeida - BRANCO, Joaquim B. Partial oxidation of methane over bimetallic nickel-lanthanide oxides. In JOURNAL OF ALLOYS AND COMPOUNDS. ISSN 0925-8388, 2010, vol. 489, no. 1, pp. 316-323.
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    GEPPERT, I. - EIZENBERG, M. - BOJARCZUK, N. A. - EDGE, L. F. - COPEL, M. - GUHA, S. Determination of band offsets, chemical bonding, and microstructure of the (TbxSc1-x)(2)O-3/Si system. In JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, 2010, vol. 108, no. 2, pp.
    AHREN, Maria - SELEGARD, Linnea - SODERLIND, Fredrik - LINARES, Mathieu - KAUCZOR, Joanna - NORMAN, Patrick - KALL, Per-Olov - UVDAL, Kajsa. A simple polyol-free synthesis route to Gd2O3 nanoparticles for MRI applications: an experimental and theoretical study. In JOURNAL OF NANOPARTICLE RESEARCH. ISSN 1388-0764, 2012, vol. 14, no. 8, pp.
    DALY, Scott R. - KIM, Do Young - GIROLAMI, Gregory S. Lanthanide N,N-Dimethylaminodiboranates as a New Class of Highly Volatile Chemical Vapor Deposition Precursors. In INORGANIC CHEMISTRY. ISSN 0020-1669, 2012, vol. 51, no. 13, pp. 7050-7065.
    HUANG, Liu-Ying - LI, Ai-Dong - FU, Ying-Ying - ZHANG, Wen-Qi - LIU, Xiao-Jie - WU, Di. Characteristics of Gd2-xLaxO3 high-k films by metal-organic chemical vapor deposition. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2012, vol. 94, no., pp. 38-43.
    BARQUINHA, Pedro - MARTINS, Rodrigo - PEREIRA, Luis - FORTUNATO, Elvira. Transparent Oxide Electronics: From Materials to Devices. In Transparent Oxide Electronics: From Materials to Devices, 2012-03-15, pp. 101-153.
    FAN, Xiaojiao - LIU, Hongxia - FEI, Chenxi. Effect of post-deposition annealing on the interfacial chemical bonding states and band alignment of atomic layer deposited neodymium oxide on silicon. In MATERIALS RESEARCH EXPRESS. ISSN 2053-1591, 2014, vol. 1, no. 4, pp.
    ZHUANG, Jiaqing - SUN, Qi-Jun - ZHOU, Ye - HAN, Su-Ting - ZHOU, Li - YAN, Yan - PENG, Haiyan - VENKATESH, Shishir - WU, Wei - LI, Robert K. Y. - ROY, V. A. L. Solution-Processed Rare-Earth Oxide Thin Films for Alternative Gate Dielectric Application. In ACS APPLIED MATERIALS & INTERFACES. ISSN 1944-8244, 2016, vol. 8, no. 45, pp. 31128-31135.
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    GOH, Kian Heng - HASEEB, A. S. M. A. - WONG, Yew Hoong. Lanthanide rare earth oxide thin film as an alternative gate oxide. In MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. ISSN 1369-8001, 2017, vol. 68, no., pp. 302-315.
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    AHMAD, Javed - WAHAB, Rizwan - SIDDIQUI, Maqsood A. - FARSHORI, Nida Nayyar - SAQUIB, Quaiser - AHMAD, Naushad - AL-KHEDHAIRY, Abdulaziz A. Neodymium oxide nanostructures and their cytotoxic evaluation in human cancer cells. In JOURNAL OF TRACE ELEMENTS IN MEDICINE AND BIOLOGY, 2022, vol. 73, no., pp. ISSN 0946-672X. Dostupné na: https://doi.org/10.1016/j.jtemb.2022.127029.
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    CategoryADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2006
    Registered inWOS
    Registered inSCOPUS
    Registered inCCC
    DOI 10.1016/j.mssp.2006.10.025
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    A
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    200620050.884Q20.554Q2
Number of the records: 1  

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