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GaAs based micromachined thermal converter for gas sensors
Title GaAs based micromachined thermal converter for gas sensors Author Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Co-authors Držík Milan Jakovenko J. Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Mozolová Želmíra SAVELEK - Elektrotechnický ústav SAV Haščík Štefan 1956 SAVELEK - Elektrotechnický ústav SAV Chlpík J. Hotový I. Řeháček V. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV SCOPUS RID Husák M. Source document Sensors and Actuators A : Physical. Vol. 142 (2008), p. 147-152 Language eng - English Country CH - Switzerland Document kind rozpis článkov z periodík (rbx) Citations MA, Bing He - ZHOU, Bao Qing - DENG, Jin Jun - YUAN, Wei Zheng. On heat insulation of micro thermal sensor using FEA. In Chinese Journal of Sensors and Actuators. ISSN 10041699, 2008-06-01, 21, 6, pp. 934-937. LI, K. - YU, S.J. - YOU, Z. - ZHAO, J.H. Gas sensor based on MEMS technology. In Transducer and Microsystem Technologies. 2008, vol. 27, no. 11, pp. 5-7. ZHOU, Z.- ZHAO, W. - SHI, Y. - WANG, T. - YU, Y. Study on thermal instability characteristics of AIN micro-hotplate gas sensor array. In Chinese Journal of Scientific Instrument. 2013, vol. 34, no. 12, pp. 2757-2762. JIA, Xiaojuan - ZHANG, Binzhen - LIU, Jun - XUE, Chenyang - HOU, Tingting - TAN, Zhenxin - WANG, Jie. Research on the GaAs-based PHEMT acceleration sensor. In Chinese Journal of Sensors and Actuators. ISSN 10041699, 2010-02-01, 23, 2, pp. 188-191. JIA, X. - ZHANG, B. - LIU, J. - XUE, C. - HOU, T. - TAN, Z. - WANG, J. Research on the GaAs-based PHEMT acceleration sensor. In Chinese Journal of Sensors and Actuators, 2010, vol.23, no.2, 188-191. ZHANG, Binzhen - JIA, Xiaojuan - LIU, Jun - XUE, Chenyang - HOU, Tingting. Design and research on a novel NEMS accelerated sensor based on GaAs PHEMT. In MANUFACTURING SCIENCE AND ENGINEERING, PTS 1-5. ISSN 1022-6680, 2010, vol. 97-101, no., pp. 4221-4224. JIA, Xiaojuan - ZHANG, Binzhen - LIU, Jun - XUE, Chenyang - HOU, Tingting. Characteristic research on an accelerated sensor based on GaAs/AlGaAs/InGaAs PHEMT. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 2010-11-29, pp. 417-420. YOBOUE, N.P. Technological studies for improving performances of a metal oxide gas sensor: development of high-temperature microhotplate and integration of nanostructured sensing material. Micro and nanotechnologies/Microelectronics. Theses. Université Paul Sabatier - Toulouse III, 2010. French. 170 p. ZHOU Z. - ZHAO W. - SHI Y. - WANG T. - YU Y. Study on thermal instability characteristics of AIN micro-hotplate gas sensor array. In Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument. ISSN: 0254-3087, DEC 2013, vol. 34, no. 12, p. 2757-2762. ZHAO, Wenjie - WANG, Xuan - WANG, Xin - SHI, Yunbo - ZHOU, Zhen. Thermalinterference analysis of ceramic micro-plate thermal-isolated gas sensor arrays. In Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument. ISSN 02543087, 2016-03-01, 37, 3, pp. 579-585. HUANG, Chi-Yo - CHUNG, Pei-Han - SHYU, Joseph Z. - HO, Yao-Hua - WU, Chao-Hsin - LEE, Ming-Che - WU, Ming-Jenn. Evaluation and Selection of Materials for Particulate Matter MEMS Sensors by Using Hybrid MCDM Methods. In SUSTAINABILITY. ISSN 2071-1050, 2018, vol. 10, no. 10, pp. ZHAO, Wen-Jie - XU, Dan - CHEN, Yin-Sheng - WANG, Xuan - SHI, Yun-Bo. A Low-Temperature Micro Hotplate Gas Sensor Based on AlN Ceramic for Effective Detection of Low Concentration NO2. In SENSORS, 2019, vol. 19, no. 17, pp. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2008 Registered in WOS Registered in SCOPUS DOI 10.1016/j.sna.2007.05.014 
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rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2008 2007 2.934 Q1 1.446 Q1
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