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Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications
Title Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications Author Rangelow I.W. Co-authors Ivanov T.Z. Ivanova K. Volland B. Grabiec P. Sarov Y. Gotszalk T. Schmidt B Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Co-authors Persaud A. Zawierucha P. Zielony M. Dontzov D. Zier M. Engl W. Sulzbach T. Mielczarski J. Kolb S. du Latimier P. Pedreau R. Djakov V. Huq S.E. Edinger K. Fortagne O. Almansa A. Blom H.O. Source document Microelectronic Engineering : An International Journal of Semiconductor Manufacturing Technology. Vol. 84, iss. 5-8 (2007) p. 1260-1264 Language eng - English Country NL - Netherlands Document kind rozpis článkov z periodík (rbx) Citations LISHCHYNSKA, Maryna - LEICHLE, Thierry - NICU, Liviu. Semi-empirical model for longitudinal piezoresistive sensitivity of microcantilevers. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2008, vol. 85, no. 5-6, pp. 1321-1325. SAHOO, D. R. - HAEBERLE, W. - BAECHTOLD, P. - SEBASTIAN, A. - POZIDIS, H. - ELEFTHERIOU, E. High-speed intermittent-contact mode scanning probe microscopy using cantilevers with integrated electrostatic actuator and thermoelectric sensor. In 2009 AMERICAN CONTROL CONFERENCE, VOLS 1-9. ISSN 0743-1619, 2009, vol., no., pp. 2278-2283. SAHOO, D. R. - SEBASTIAN, A. - HAEBERLE, W. - POZIDIS, H. - ELEFTHERIOU, E. Magnetoresistive Sensor based Scanning Probe Microscopy. In 2009 9TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2009, vol., no., pp. 862-865. MISIAKOS, K. - RAPTIS, I. - GOUSTOURIDIS, D. - KITSARA, M. - CONTOPANAGOS, H. - GERARDINO, A. - VALAMONTES, E. Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications. In 2009 IEEE SENSORS, VOLS 1-3, 2009, vol., no., pp. 429-432. HESKETH, Peter J. - LIN, Xiaohui. Packaging of Biomolecular and Chemical Microsensors. In NANO-BIO-ELECTRONIC, PHOTONIC AND MEMS PACKAGING, 2010, vol., no., pp. 565-611. SAHOO, Deepak R. - HAEBERLE, Walter - SEBASTIAN, Abu - POZIDIS, Haralampos - ELEFTHERIOU, Evangelos. High-throughput intermittent-contact scanning probe microscopy. In NANOTECHNOLOGY. ISSN 0957-4484, 2010, vol. 21, no. 7, pp. SULZBACH, Thomas - ENGL, Wolfgang - MAIER, Reinhard - DIEBEL, Joerg - DONTSOV, Denis - LANGLOTZ, Enrico - SCHOTT, Walter. Cantilever Arrays with Integrated Actuation and Sensing for Sensing for Parallel SPM. In EUROSENSORS XXIV CONFERENCE. ISSN 1877-7058, 2010, vol. 5, no., pp. 621-624. MATVIYKIV, Oleh - LOBUR, Mykhaylo. Design principles and sensitivity analysis of MEMS cantilever sensors. In Perspective Technologies and Methods in MEMS Design, MEMSTECH'2010 Proceedings of the 6th International Conference, 2010-08-06, pp. 230-232. CHOI, Chul Hyun - LEE, Dong Jin - SUNG, Jun-Ho - LEE, Min Woo - LEE, Seung-Gol - PARK, Se-Geun - LEE, El-Hang - BEOM-HOAN, O. A study of AFM-based scratch process on polycarbonate surface and grating application. In APPLIED SURFACE SCIENCE. ISSN 0169-4332, 2010, vol. 256, no. 24, pp. 7668-7671. FAVRE, Melanie - POLESEL-MARIS, Jerome - OVERSTOLZ, Thomas - NIEDERMANN, Philippe - DASEN, Stephan - GRUENER, Gabriel - ISCHER, Real - VETTIGER, Peter - LILEY, Martha - HEINZELMANN, Harry - MEISTER, Andre. Parallel AFM imaging and force spectroscopy using two-dimensional probe arrays for applications in cell biology. In JOURNAL OF MOLECULAR RECOGNITION. ISSN 0952-3499, 2011, vol. 24, no. 3, pp. 446-452. SAHOO, Deepak R. - SEBASTIAN, Abu - HAEBERLE, Walter - POZIDIS, Haralampos - ELEFTHERIOU, Evangelos. Scanning probe microscopy based on magnetoresistive sensing. In NANOTECHNOLOGY. ISSN 0957-4484, 2011, vol. 22, no. 14, pp. SAHOO, Deepak R. - HAEBERLE, Walter - SEBASTIAN, Abu - POZIDIS, Haralampos - ELEFTHERIOU, Evangelos. High-Bandwidth Intermittent-Contact Mode Scanning Probe Microscopy Using Electrostatically-Actuated Microcantilevers. In CONTROL TECHNOLOGIES FOR EMERGING MICRO AND NANOSCALE SYSTEMS. ISSN 0170-8643, 2011, vol. 413, no., pp. 119. YACOOT, Andrew - KOENDERS, Ludger. Recent developments in dimensional nanometrology using AFMs. In MEASUREMENT SCIENCE AND TECHNOLOGY. ISSN 0957-0233, 2011, vol. 22, no. 12, pp. SAHOO, Deepak R. - SEBASTIAN, Abu - HAEBERLE, Walter - POZIDIS, Haralampos - ELEFTHERIOU, Evangelos. Scanning probe microscopy based on magnetoresistive sensing. In NANOTECHNOLOGY. ISSN 0957-4484, 2011, vol. 22, no. 14, pp. SATTEL, Thomas - ROESER, Dennis - GUTSCHMIDT, Stefanie. MULTI-PHYSICS MODELING OF A ELECTRO-THERMALLY ACTUATED MICRO-CANTILEVER FOR SCANNING PROBE MICROSCOPY. In PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2010, VOL 8, PTS A AND B, 2012, vol., no., pp. 1057-1065. WANG, J. Sampling for the measurement of structured surfaces. PhD Thesis, University of Huddersfield. 2012, 207 p. SIKORA, A. Development and utilization of advanced atomic force microscopy techniques in diagnostics of the electrotechnical materials. Chosen problem. In Prace Instytutu Elektrotechniki. 2012, no. 257, pp. 13-186. WANG, J. - JIANG, X. - BLUNT, L. A. - LEACH, R. K. - SCOTT, P. J. Intelligent sampling for the measurement of structured surfaces. In MEASUREMENT SCIENCE AND TECHNOLOGY. ISSN 0957-0233, 2012, vol. 23, no. 8, pp. MOHANASUNDARAM, S. M. - PRATAP, Rudra - GHOSH, Arindam. Cantilever Resonator With Integrated Actuation and Sensing Fabricated Using a Single Step Lithography. In IEEE SENSORS JOURNAL. ISSN 1530-437X, 2013, vol. 13, no. 2, pp. 440-441. VYKOV, A.V. Design and technology features cantilevers for atomic force microscopy. In Izvestiya SfedU, Engineering Sciences. 2014, no. 9, pp. 141-150. BAUSELLS, Joan. Piezoresistive cantilevers for nanomechanical sensing. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2015, vol. 145, no., pp. 9-20. LUBY, Štefan - LUBYOVÁ, Martina - ŠIFFALOVIČ, Peter - JERGEL, Matej - MAJKOVÁ, Eva. A brief history of nanoscience and foresight in nanotechnology. In Nanomaterials and Nanoarchitectures: A Complex Review of Current Hot Topics and their Applications, 2015-08-31, pp. 63-86. LUBY, Štefan - LUBYOVÁ, Martina - ŠIFFALOVIČ, Peter - JERGEL, Matej - MAJKOVÁ, Eva. A brief history of nanoscience and foresight in nanotechnology. In NATO Science for Peace and Security Series C: Environmental Security. ISSN 18746519, 2015-01-01, 139, pp. 63-86. SIKORA, A. Quantitative normal force measurements by means of atomic force microscopy towards the accurate and easy spring constant determination. In Nanoscience and Nanometrology. 2016, vol. 2, no. 1, pp. 8-29. CHEN, Jialiang - LIU, Jiantao - YU, Bingjun - CHEN, Lei - JIN, Chenning - QIAN, Linmao. Preparation of multi-tip arrays on flexible substrates for large-scale microfabrication. In MICRO & NANO LETTERS. ISSN 1750-0443, 2017, vol. 12, no. 2, pp. 104-108. KAMBALI, P. N. - TORRES, F. - BARNIOL, N. - GOTTLIEB, O. Nonlinear multi-element interactions in an elastically coupled microcantilever array subject to electrodynamic excitation. In NONLINEAR DYNAMICS. ISSN 0924-090X, 2019, vol. 98, no. 4, pp. 3067-3094. HAO, Yansheng - CHENG, Shaokoon - TANAKA, Yo - HOSOKAWA, Yoichiroh - YALIKUN, Yaxiaer - LI, Ming. Mechanical properties of single cells: Measurement methods and applications. In BIOTECHNOLOGY ADVANCES. ISSN 0734-9750, 2020, vol. 45, no., pp. MANICKAVASAGAM, Arun K. - GUTSCHMIDT, Stefanie - SELLIER, Mathieu. Hydrodynamic loading profiles of viscously-interacting blocks subject to different stimulus locations. In Journal of the Royal Society of New Zealand. ISSN 03036758, 2021-01-01, pp. MANICKAVASAGAM, A.K. - GUTSCHMIDT, S. - SELLIER, M. Hydrodynamic loading with shifting stimulus in arrays. In Journal of the Royal Society of New Zealand. ISSN 0303-6758, 2021, vol. 51, no. 2, pp. 346-360. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2007 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1016/j.mee.2007.01.219 
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rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2007 2006 1.398 Q1 0.966 Q1
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