A simulation model for chemically amplified resist CAMP6

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Title	A simulation model for chemically amplified resist CAMP6 : abstract book
Author	Vutova Katia Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Tanaka T.

Co-authors	Koleva Elena Mladenov Georgy Kawabata Keishi
Source document	34th International Conference on Micro & nano Engineering : MNE 2008. -, 2008
Language	eng - English
Country	GR - Greece
Document kind	rozpis článkov z periodík (rzb)
Category	AFG - Abstracts of papers from foreign conferences
Year	2008
DOI	10.1016/j.mee.2008.11.010

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Number of the records: 1