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DUV resist UV II HS applied to high resolution electron beam lithography and to masked ion beam proximity and reduction printing

  1. TitleDUV resist UV II HS applied to high resolution electron beam lithography and to masked ion beam proximity and reduction printing
    Author Bruenerg W. H. Cekan E.

    Hudek Peter 1953-    SCOPUS    RID    ORCID

    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV    SCOPUS    RID    ORCID

    Loeschner Hans

    Rangelow I.W.

    Torkler M.

    Co-authors Buschbeck H. Eder S. Fedynyshyn T. H. Hertlein W. G.
    Source document Microelectronic Engineering : an International Journal of Semiconductor Manufacturing Technology. Vol. 42 (1998) p. 237-240
    Languageeng - English
    CountryNL - Netherlands
    Document kindrozpis článkov z periodík (rbx)
    CitationsNICOLAU, Dan V. - SOLANA, Gerardin - KEKIC, Murat - FULGA, Florin - MAHANIVONG, Chitladda - WRIGHT, Jonathan - DOS REMEDIOS, Cristobal G. Surface Hydrophobicity modulates the operation of actomyosin-based dynamic nanodevices. In LANGMUIR. ISSN 0743-7463, 2007, vol. 23, no. 21, pp. 10846-10854.
    NICOLAU, Dan V. - SOLANA, Geri - KEKIC, Murat - IVANOVA, Elena P. - DOS REMEDIOS, Cristobal. Surface hydrophobicity modulates the operation of protein molecular motors. In 2006 INTERNATIONAL CONFERENCE ON NANOSCIENCE AND NANOTECHNOLOGY, VOLS 1 AND 2, 2006, vol., no., pp. 714-+.
    NICOLAU, Dan V. - SOLANA, Gerardin - KEKIC, Murat - FULGA, Florin - MAHANIVONG, Chitladda - WRIGHT, Jonathan - DOS REMEDIOS, Cristobal G. Surface Hydrophobicity modulates the operation of actomyosin-based dynamic nanodevices. In LANGMUIR. ISSN 0743-7463, 2007, vol. 23, no. 21, pp. 10846-10854.
    CategoryADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year1998
    Registered inWOS
    Registered inSCOPUS
    DOI 10.1016/S0167-9317(98)00054-9
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    A
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    1998
Number of the records: 1  

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