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Investigation of deep interface traps in very-thin oxide /Si structures prepared at low temperatures using chemical solutions

  1. TitleInvestigation of deep interface traps in very-thin oxide /Si structures prepared at low temperatures using chemical solutions
    Author Rusnák Jaroslav 1958 SAVFYZIK - Fyzikálny ústav SAV    ORCID Pinčík Emil 1956 SAVFYZIK - Fyzikálny ústav SAV    ORCID

    Co-authors Ružinský M. Imamura K. Matsumoto T. Štefečka M. Takahashi M. Kobayashi H.
    Source document Materials Science Forum. Vol. 609 (2009), p. 123. - Zürich : Trans. Tech. Publications
    Languageeng - English
    CountryCH - Switzerland
    Document kindrozpis článkov z periodík (rzb)
    CategoryAFC - Published papers from foreign scientific conferences
    Year2009
    Registered inWOS
    article

    article

    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    200920080.298Q2
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