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Parallel proximal probe arrays with vertical interconnections
Title Parallel proximal probe arrays with vertical interconnections Author Sarov Y. Co-authors Frank A. Ivanov Tzv. Zöllner J.-P. Ivanova K. Volland B. Rangelow I.W. Brogan A. Wilson R. Zawierucha P. Zielony M. Gotszalk T. Nikolov N. Zier M. Schmidt B Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Source document Journal of Vacuum Science and Technology B. Vol. 27, no. 6 (2009), p. 3132-3138, Microelectronics and Nanometer Structures Language eng - English Country GB - Great Britian Document kind rozpis článkov z periodík (rbx) Citations SCHUMANN, W. Ätzung und charakterisierung von strukturen mit hohem aspektverhältnis in silizium am beispiel von through-wafer-via-holes. Diplomarbeit, Technische Universität Ilmenau. 2009, 117 p. SATTEL, Thomas - ROESER, Dennis - GUTSCHMIDT, Stefanie. MULTI-PHYSICS MODELING OF A ELECTRO-THERMALLY ACTUATED MICRO-CANTILEVER FOR SCANNING PROBE MICROSCOPY. In PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION 2010, VOL 8, PTS A AND B, 2012, vol., no., pp. 1057-1065. SIKORA, Andrzej - BEDNARZ, Lukasz. Dynamic speed control in atomic force microscopy to improve imaging time and quality. In MEASUREMENT SCIENCE AND TECHNOLOGY. ISSN 0957-0233, 2014, vol. 25, no. 4, pp. RUPPERT, Michael G. - YONG, Yuen K. Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy. In 2018 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM). ISSN 2159-6255, 2018, vol., no., pp. 144-149. RUPPERT, Michael G. - FLEMING, Andrew J. - YONG, Yuen K. Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors. In SENSORS AND ACTUATORS A-PHYSICAL. ISSN 0924-4247, 2021, vol. 319, no., pp. Dostupné na: https://doi.org/10.1016/j.sna.2020.112519. ANDE, Raghu - GUTSCHMIDT, Stefanie - SELLIER, Mathieu. Fluid dynamics investigation of a large array. In PHYSICS OF FLUIDS. ISSN 1070-6631, 2021, vol. 33, no. 7, pp. Dostupné na: https://doi.org/10.1063/5.0056363. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2010 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1116/1.3256662 
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rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2009 2008 1.445 Q2 0.998 Q1
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