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Optimization of the ohmic contact processing in InAlN/GaN high electron mobility transistors for lower temperature of annealing

  1. TitleOptimization of the ohmic contact processing in InAlN/GaN high electron mobility transistors for lower temperature of annealing
    Author Čičo Karol SAVELEK - Elektrotechnický ústav SAV
    Co-authors Gregušová Dagmar 1958 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Gaži Štefan 1948 SAVELEK - Elektrotechnický ústav SAV

    Šoltýs Ján 1977 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Kuzmík Ján 1960 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Carlin J.-F.

    Grandjean N.

    Pogany D.

    Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Source document Physica Status Solidi C. Vol. 7, (2010), p. 108-111
    Languageeng - English
    CountryDE - Germany
    Document kindrozpis článkov z periodík (rbx)
    CitationsKIM, S. - RYOU, J.H. - DUPUIS, R.D. - KIM, H. In APPLIED PHYSICS LETTERS. FEB 4 2013, vol. 102, no. 5.
    LEE, D.S. - LIU, Z.H. - PALACIOS, T. In JAPANESE JOURNAL OF APPLIED PHYSICS. OCT 2014, vol. 53, no. 10.
    BERGSTEN, J. - MALMROS, A. - TORDJMAN, M. - GAMARRA, P. - LACAM, C. - DI FORTE-POISSON, M.A. - RORSMAN, N. In SEMICONDUCTOR SCIENCE AND TECHNOLOGY. OCT 2015, vol. 30, no. 10.
    LI, Q. - CHEN, Q. - CHONG, J. In AIP ADVANCES. DEC 2017, vol. 7, no. 12.
    LI, Q. - CHEN, Q. - CHONG, J. Variational study of the 2DEG wave function in InAlN/GaN heterostructures. In ACTA PHYSICA SINICA. JAN 20 2018, vol. 67, no. 2.
    LIN, Y.K. - BERGSTEN, J. - LEONG, H. - MALMROS, A. - CHEN, J.T. - CHEN, D.Y. - KORDINA, O. - ZIRATH, H. - CHANG, E.Y. - RORSMAN, N. A versatile low-resistance ohmic contact process with ohmic recess and low-temperature annealing for GaN HEMTs. In SEMICONDUCTOR SCIENCE AND TECHNOLOGY. SEP 2018, vol. 33, no. 9.
    YOSHIDA, T. - EGAWA, T. Dynamic variation of carrier transport properties of recessed Au-free ohmic contacts to InAlN/AlN/GaN on Si-wafer. In JAPANESE JOURNAL OF APPLIED PHYSICS. NOV 2018, vol. 57, no. 11.
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2010
    Registered inWOS
    Registered inSCOPUS
    DOI 10.1002/pssc.200982640
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    N
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    201020090.428Q3
Number of the records: 1  

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