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Fabrication of piezoresistive sensed AFM cantilever probe with integrated tip
Title Fabrication of piezoresistive sensed AFM cantilever probe with integrated tip Author Rangelow I.W. Co-authors Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Gotszalk T. Grabiec P.B. Co-authors Dumania P. Source document Proceedings of the SPIE. Vol. 2879 (1996), p. 56-64 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations BOTTOMLEY, LA. Scanning probe microscopy. In ANALYTICAL CHEMISTRY. ISSN 0003-2700, 1998, vol. 70, no. 12, pp. 425R-475R. HASCIK, S - LALINSKY, T - MOZOLOVA, Z - KUZMIK, J. Patterning of cantilevers for power sensor microsystem. In VACUUM. ISSN 0042-207X, 1998, vol. 51, no. 2, pp. 307-309. PERSAUD, A. Aligned ion implantation using scanning probes. PhD Thesis, Universität in Frankfurt am Main. 2006, 104 p. KOLEV, Kolyo - POPOV, Cyril - PETKOVA, Tamara - PETKOV, Plamen - MIHAILESCU, Ion N. - REITHMAIER, Johann Peter. Complex (As(2)S(3))((100-x))(AgI)(x) chalcogenide glasses for gas sensors. In SENSORS AND ACTUATORS B-CHEMICAL. ISSN 0925-4005, 2009, vol. 143, no. 1, pp. 395-399. PAYTON, O. D. - PICCO, L. - SCOTT, T. B. High-speed atomic force microscopy for materials science. In INTERNATIONAL MATERIALS REVIEWS. ISSN 0950-6608, 2016, vol. 61, no. 8, pp. 473-494. ZAWIERTA, Michal - JEFFERY, Roger D. - PUTRINO, Gino - SILVA, K. K. M. B. Dilusha - KEATING, Adrian - MARTYNIUK, Mariusz - FARAONE, Lorenzo. Atomic force microscopy with integrated on-chip interferometric readout. In ULTRAMICROSCOPY. ISSN 0304-3991, 2019, vol. 205, no., pp. 75-83. Category ADEA - Scientific papers in other foreign journals not registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1996 Registered in SCOPUS 
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rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore N rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 1996
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