Number of the records: 1
Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy
Title Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy Author Gotszalk T. Co-authors Radojewski J. Grabiec P.B. Dumania F. Shi P. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 16, iss. 6 (1998), p. 3948-3953, Microelectronics and Nanometer Structures Language eng - English Document kind rozpis článkov z periodík (rbx) Citations BASHIR, R - GUPTA, A - NEUDECK, GW - MCELFRESH, M - GOMEZ, R. On the design of piezoresistive silicon cantilevers with stress concentration regions for scanning probe microscopy applications. In JOURNAL OF MICROMECHANICS AND MICROENGINEERING. ISSN 0960-1317, 2000, vol. 10, no. 4, pp. 483-491. HAFIZOVIC, S - BARRETTINO, D - VOLDEN, T - SEDIVY, J - KIRSTEIN, KU - BRAND, O - HIERLEMANN, A. Single-chip mechatronic microsystem for surface imaging and force response studies. In PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA. ISSN 0027-8424, 2004, vol. 101, no. 49, pp. 17011-17015. BARRETTINO, D - HAFIZOVIC, S - VOLDEN, T - SEDIVY, J - KIRSTEIN, KU - HIERLEMANN, A. CMOS monolithic mechatronic microsystem for surface imaging and force response studies. In IEEE JOURNAL OF SOLID-STATE CIRCUITS. ISSN 0018-9200, 2005, vol. 40, no. 4, pp. 951-959. WANG, ZY - YUE, RF - ZHANG, RX - LIU, LT. Design and optimization of laminated piezoresistive microcantilever sensors. In SENSORS AND ACTUATORS A-PHYSICAL. ISSN 0924-4247, 2005, vol. 120, no. 2, pp. 325-336. KASSING, Rainer - KULISCH, Wilhelm. Nanoscaled materials: A brief introduction. In FUNCTIONAL PROPERTIES OF NANOSTRUCTURED MATERIALS. ISSN 1568-2609, 2006, vol. 223, no., pp. 3-+. HAFIZOVIC, Sadik - KIRSTEIN, Kay-Uwe - HIERLEMANN, Andreas. Integrated Cantilevers and Atomic Force Microscopes. In APPLIED SCANNING PROBE METHODS V: SCANNING PROBE MICROSCOPY TECHNIQUES. ISSN 1434-4904, 2007, vol., no., pp. 1-22. WEHRMEISTER, Jana - FUSS, Achim - SAURENBACH, Frank - BERGER, Ruediger - HELM, Mark. Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry. In REVIEW OF SCIENTIFIC INSTRUMENTS. ISSN 0034-6748, 2007, vol. 78, no. 10, pp. CHANG, Po-Kuang - LIN, Jium-Ming. Scanning probe microscope system design with fuzzy control. In PROCEEDINGS OF THE 9TH WSEAS INTERNATIONAL CONFERENCE ON AUTOMATION AND INFORMATION. ISSN 1790-5117, 2008, vol., no., pp. 548-+. CHANG, Po-Kuang - LIN, Jium-Ming. Scanning Probe Microscope System Design with Linear Velocity Transducer for Feedback Compensation. In 2008 PROCEEDINGS OF SICE ANNUAL CONFERENCE, VOLS 1-7, 2008, vol., no., pp. 2281-+. ZHOU, Youzheng - WANG, Zheyao - ZHANG, Qi - RUAN, Wenzhou - LIU, Litian. A Front-Side Released Single Crystalline Silicon Piezoresistive Microcantilever Sensor. In IEEE SENSORS JOURNAL. ISSN 1530-437X, 2009, vol. 9, no. 3, pp. 246-254. KIM, Min-Seok - PRATT, Jon R. SI traceability: Current status and future trends for forces below 10 microNewtons. In MEASUREMENT. ISSN 0263-2241, 2010, vol. 43, no. 2, pp. 169-182. LEE, J. - CHUNARA, R. - SHEN, W. - PAYER, K. - BABCOCK, K. - BURG, T. P. - MANALIS, S. R. Suspended microchannel resonators with piezoresistive sensors. In LAB ON A CHIP. ISSN 1473-0197, 2011, vol. 11, no. 4, pp. 645-651. BAUSELLS, Joan. Piezoresistive cantilevers for nanomechanical sensing. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2015, vol. 145, no., pp. 9-20. ZHANG, Le-Min - JIAO, Bin-Bin - YUN, Shi-Chang - KONG, Yan-Mei - CHEN, Da-Peng. Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks. In JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. ISSN 1057-7157, 2017, vol. 26, no. 3, pp. 601-608. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1998 Registered in WOS Registered in SCOPUS Registered in CCC 
article
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 1998 1997 1.590
Number of the records: 1