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Investigations on sensitivity of electron resists

  1. TitleInvestigations on sensitivity of electron resists
    Author Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV    SCOPUS    RID
    Co-authors Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV    SCOPUS    RID

    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV    SCOPUS    RID    ORCID

    Vutova Katia

    Koleva Elena

    Mladenov Georgy

    Source document Elektrotechnica & elektronica E+E. Vol. 47 (2012) no. 5-6, p. 10-13
    Languageeng - English
    CountryBG - Bulgaria
    Document kindrozpis článkov z periodík (rbx)
    CategoryADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2012
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    N
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    2012
Number of the records: 1  

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