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Behaviour of amorphous silicon carbide in Au/a-SiC/Si heterostructures prepared by PECVD technology using two different RF modes

  1. TitleBehaviour of amorphous silicon carbide in Au/a-SiC/Si heterostructures prepared by PECVD technology using two different RF modes
    Author Perný M.
    Co-authors Mikolášek M.

    Šály V.

    Ružinský M.

    Ďurman V.

    Pavuk M.

    Huran Jozef 1955 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Országh J.

    Matejčík Š.

    Source document Applied Surface Science. Vol. 269, (2013), p.143-147
    Languageeng - English
    Document kindrozpis článkov z periodík (rbx)
    CitationsCampos, T.M.B., Da Silva Sobrinho, A.S., Pessoa, R.S., Maciel, H.S., Massi, M.: Materials Research 17 (2014), pp. 472-476
    LEAL, G. - CAMPOS, T.M.B. - SOBRINHO, A.S.D. - PESSOA, R.S. - MACIEL, H.S. - MASSI, M. In MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS. MAR-APR 2014, vol. 17, no. 2, p. 472-476.
    DRINEK, V. - STRASAK, T. - NOVOTNY, F. - FAJGAR, R. - BASTL, Z. In APPLIED SURFACE SCIENCE. FEB 15 2014, vol. 292, p. 413-419.
    BARBOUCHE, M. - ZAGHOUANI, R.B. - BENAMMAR, N.E. - KHIROUNI, K. - TURAN, R. - EZZAOUIA, H. Impact of rapid thermal annealing on impurities removal efficiency from silicon carbide for optoelectronic applications. In INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY. ISSN 0268-3768, JAN 2020, vol. 106, no. 1-2, p. 731-739.
    CategoryADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2013
    Registered inWOS
    Registered inSCOPUS
    Registered inCCC
    DOI 10.1016/j.apsusc.2012.09.086
    article

    article

    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    A
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    201320122.112Q10.913Q1
Number of the records: 1  

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