Optimization of e-beam nanostructure patterning for TiO2 gas sensors fabrication

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Title	Optimization of e-beam nanostructure patterning for TiO2 gas sensors fabrication
Author	Ďurina P.
Co-authors	Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Vutova Katia
	Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Koleva Elena
	Mladenov Georgy
	Kúš P.
	Pleceník A.

Source document	/ Dimitrova M. ; Ghelev Ch. Eighteenth International Summer School on Vacuum, Electron and Ion Technologies : VEIT 2013. P. 90. - Sofia : Institute of Electronics Bulgarian Academy of Sciences, 2013 ; International Summer School on Vacuum, Electron and Ion Technologies VEIT 2013
Language	eng - English
Country	BG - Bulgaria
Document kind	rozpis článkov z periodík (rzb)
Category	AFE - Abstracts of invited papers from foreign conferences
Year	2013

article

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2013

Number of the records: 1