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Determination of residual stress in thin film by GIXRD

  1. TitleDetermination of residual stress in thin film by GIXRD
    Author Novák P.
    Co-authors Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Búc D.

    Kováč Jaroslav

    Source document / Vajda J. ; Jamnický I. Proceedings of the 20th International Conference on Applied Physics of Condensed Matter : APCOM 2014. P. 300-303. - Bratislava : FEI STU, 2014 ; International Conference on Applied Physics of Condensed Matter APCOM 2014
    Languageslo - Slovak
    Document kindrozpis článkov z periodík (rzb)
    CategoryAFD - Published papers from domestic scientific conferences
    Year2014
    article

    article

    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    2014
Number of the records: 1  

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