Number of the records: 1
Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions
Title Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions Author Zehetner J. Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Choleva P. Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Source document / Breza Juraj ; Donoval Daniel ; Vavrinský E. ASDAM 2014 : The 10th International Conference on Advanced Semiconductor Devices and Microsystems. P. 259-262. - : IEEE, 2014 Language slo - Slovak Document kind rozpis článkov z periodík (rzb) Category AFC - Published papers from foreign scientific conferences Year 2014 
article
rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2014
Number of the records: 1