Study of electron beam resists: negative tone HSQ and positive tone SML300

Number of the records: 1

Title	Study of electron beam resists: negative tone HSQ and positive tone SML300
Author	Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
Co-authors	Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Koleva Elena
	Vutova Katia
	Mladenov Georgy

Source document	Elektrotechnika i elektronika E+E : Eleventh International Conference on Electron Beam Technologies. Vol. 49 (2014) no. 5-6
Language	eng - English
Country	BG - Bulgaria
Document kind	rozpis článkov z periodík (rbx)
Category	ADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted)
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2014

article

rok	CC	IF	IF Q (best)	JCR Av Jour IF Perc	SJR	SJR Q (best)	CiteScore
	N

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2014

Number of the records: 1