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Resist characteristics simulation of HSQ electron beam resist
Title Resist characteristics simulation of HSQ electron beam resist Author Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV SCOPUS RID Co-authors Vutova Katia Koleva Elena Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV SCOPUS RID Mladenov Georgy Source document Electrotechnica & electronica E+E. Vol. 51, no. 5-6 (2016), p. 246-250 Language eng - English Country BG - Bulgaria Note Twelfth International Conference on Electron Beam Technologies (EBT 2016), 13-18 June 2016, Varna, Bulgaria Document kind rozpis článkov z periodík (rbx) Category ADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2016 
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rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore N rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2016
Number of the records: 1