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Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate

  1. TitleRole of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate
    Author Sobierajski Ryszard
    Co-authors Jacyna Iwanna

    Dlužewski Piotr

    Klepka Marcin T.

    Klinger Dorota

    Pelka Jerzy B.

    Burian Tomáš

    Hájková V.

    Juha Libor

    Saksl Karel 1974 SAVMATVY - Ústav materiálového výskumu SAV    SCOPUS    ORCID

    Vozda Vojtěch

    Makhotkin Igor

    Louis Eric

    Faatz Bart

    Tiedtke Kai

    Toleikis Sven

    Enkisch Hartmut

    Hermann M.

    Strobel Sebastian

    Loch Rolf A.

    Chalupský Jaromír

    Source document Optics Express. Vol. 24, no. 14 (2016), p. 15468-15477
    Languageeng - English
    CountryUS - United States of America
    Document kindrozpis článkov z periodík (rbx)
    CitationsKRZYWINSKI, Jacek - CONLEY, Raymond - MOELLER, Stefan - GWALT, Grzegorz - SIEWERT, Frank - WABERSKI, Christoph - ZESCHKE, Thomas - COCCO, Daniele. Damage thresholds for blaze diffraction gratings and grazing incidence optics at an X-ray free-electron laser. In JOURNAL OF SYNCHROTRON RADIATION. ISSN 1600-5775, 2018, vol. 25, no., pp. 85-90.
    ROSSBACH, Joerg - SCHNEIDER, Jochen R. - WURTH, Wilfried. 10 years of pioneering X-ray science at the Free-Electron Laser FLASH at DESY. In PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS. ISSN 0370-1573, 2019, vol. 808, no., pp. 1-74.
    SAKAUE, Kazuyuki - MOTOYAMA, Hiroto - HAYASHI, Ryosuke - IWASAKI, Atsushi - MIMURA, Hidekazu - YAMANOUCHI, Kaoru - SHIBUYA, Tatsunori - ISHINO, Masahiko - DINH, Thanh-Hung - OGAWA, Hiroshi - HIGASHIGUCHI, Takeshi - NISHIKINO, Masaharu - KURODA, Ryunosuke. Surface processing of PMMA and metal nano-particle resist by sub-micrometer focusing of coherent extreme ultraviolet high-order harmonics pulses. In OPTICS LETTERS. ISSN 0146-9592, 2020, vol. 45, no. 10, pp. 2926-2929.
    CHEN, Tong - WANG, Wenjun - TAO, Tao - ZHANG, Yilin - MEI, Xuesong. Weakening heat accumulation behavior caused by femtosecond pulses for high-performance antireflection micro-nano porous structures. In INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER. ISSN 0017-9310, 2021, vol. 164, no., pp.
    KONONENKO, Taras - SOVYK, Dmitry N. - KONONENKO, Vitaly V. - KONOV, Vitaly. Optimization strategy for high-quality laser milling of silicon. In OPTICS AND LASER TECHNOLOGY, 2022, vol. 150, no., pp. ISSN 0030-3992. Dostupné na: https://doi.org/10.1016/j.optlastec.2022.107921.
    JIA, Z.C. - SUN, L.H. - CHEN, X. - LI, X.H. - LI, Z.W. - HAO, L.Y. Thermal process of a silicon wafer under a CW laser and 100-10000 Hz pulsed laser irradiation. In APPLIED OPTICS. ISSN 1559-128X, DEC 20 2023, vol. 62, no. 36, p. 9577-9582. Dostupné na: https://doi.org/10.1364/AO.501947.
    KLEIN, Y. - TRIPATHI, A.K. - STRIZHEVSKY, E. - CAPOTONDI, F. - DE ANGELIS, D. - GIANNESSI, L. - PANCALDI, M. - PEDERSOLI, E. - PRINCE, K.C. - SEFI, O. - KIM, Y.Y. - VARTANYANTS, I.A. - SHWARTZ, S. High-spectral-resolution absorption measurements with free-electron lasers using ghost spectroscopy. In PHYSICAL REVIEW A. ISSN 2469-9926, MAY 5 2023, vol. 107, no. 5. Dostupné na: https://doi.org/10.1103/PhysRevA.107.053503.
    CAO, J.Y. - LI, S.H. - TONG, Y.J. - TANG, M. - LI, W.B. - HUANG, Q.S. - JIANG, H.D. - WANG, Z.S. Damage resistance of B4C reflective mirror irradiated by X-ray free-electron laser. In CHINESE OPTICS LETTERS. ISSN 1671-7694, FEB 10 2023, vol. 21, no. 2. Dostupné na: https://doi.org/10.3788/COL202321.023401.
    CategoryADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2016
    Registered inWOS
    Registered inSCOPUS
    Registered inCCC
    DOI 10.1364/OE.24.015468
    article

    article

    File nameAccessSizeDownloadedTypeLicense
    Role of heat accumulation in the multi-shot damage.pdfavailable3 MB2Publisher's version
    rokCCIFIF Q (best)JCR Av Jour IF PercSJRSJR Q (best)CiteScore
    A
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    201620153.148Q11.910Q1
Number of the records: 1  

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