Study of negative electron beam nanoresist HSQ on GaAs substrate

Number of the records: 1

Title	Study of negative electron beam nanoresist HSQ on GaAs substrate
Author	Andok Robert 1973- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
Co-authors	Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID
	Škriniarová Jaroslava
	Vutova Katia

Source document	ASDAM 2016 : the 11th International Conference on Advanced Semiconductor Devices and Microsystems. P. 133-136. - : IEEE, 2016 / Haščík Štefan 1956 ; Dzuba Jaroslav 1987 ; Vanko Gabriel 1981
Language	eng - English
Country	US - United States of America
Document kind	rozpis článkov z periodík (rzb)
Citations	HARŤANSKÝ, R. - HRICKO, J. - MIERKA, M. - HALGOŠ, J. - DZURIŠ, M. MEMS sensor of force. In Russian Journal of Nonlinear Dynamics. ISSN 26585324, 2020-01-01, 16, 1, pp. 85-92.
Category	ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2017
Registered in	WOS
Registered in	SCOPUS
DOI	10.1109/ASDAM.2016.7805913

article

rok	CC	IF	IF Q (best)	JCR Av Jour IF Perc	SJR	SJR Q (best)	CiteScore
	N

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2016

Number of the records: 1