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Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser
Title Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser Author Milov Igor Co-authors Makhotkin Igor Sobierajski Ryszard Medvedev Nikita Lipp Vladimir Saksl Karel 1974 SAVMATVY - Ústav materiálového výskumu SAV SCOPUS ORCID Source document Optics Express. Vol. 26, no. 15 (2018), p. 19665-19685 Language eng - English Country US - United States of America Document kind rozpis článkov z periodík (rbx) Citations ZHANG, Zhe - LI, Wenbin - HUANG, Qiushi - ZHANG, Zhong - YI, Shengzhen - PAN, Liuyang - XIE, Chun - WACHULAK, Przemyslaw - FIEDOROWICZ, Henryk - WANG, Zhanshan. A table-top EUV focusing optical system with high energy density using a modified Schwarzschild objective and a laser-plasma light source. In REVIEW OF SCIENTIFIC INSTRUMENTS. ISSN 0034-6748, 2018, vol. 89, no. 10, pp. LI, Wenbin - ZHANG, Zhe - PAN, Liuyang - HUANG, Qiushi - ZHANG, Zhong - YI, Shengzhen - XIE, Chun - WANG, Zhanshan. Table-top Focused EUV Optical System with High Energy Density and its Application on EUV Damage Tests. In OPTICS DAMAGE AND MATERIALS PROCESSING BY EUV/X-RAY RADIATION VII. ISSN 0277-786X, 2019, vol. 11035, no., pp. LI, Wenbin - PAN, Liuyang - WANG, Chunlin - ZHANG, Zhe - XIE, Chun - HUANG, Qiushi - WANG, Zhanshan. Multi-shot damage on Mo/Si multilayer induced by nanosecond EUV radiation. In AIP ADVANCES, 2021, vol. 11, no. 1, pp. LI, Wenbin - WANG, Chunlin - PAN, Liuyang - WU, Jiali - CAO, Jinyu - HUANG, Qiushi - XIE, Chun - WANG, Zhanshan. Damage study on Binf4/infC films using a table-top nanosecond EUV damage instrument. In Proceedings of SPIE The International Society for Optical Engineering. ISSN 0277786X, 2021-01-01, 11776, pp. DE HAAN, G. - VAN DEN HOOVEN, T. J. - PLANKEN, P. C. M. Ultrafast laser-induced strain waves in thin ruthenium layers. In OPTICS EXPRESS. ISSN 1094-4087, 2021, vol. 29, no. 20, pp. 32051-32067. Dostupné na: https://doi.org/10.1364/OE.438286. WANG ZHANSHAN - HUANG QIUSHI - ZHANG ZHONG - YI SHENGZHEN - LI WENBIN - SHEN ZHENGXIANG - QI RUNZE - YU JUN. Extreme Ultraviolet, X-Ray and Neutron Thin Film Optical Components and Systems. In ACTA OPTICA SINICA. ISSN 0253-2239, 2021, vol. 41, no. 1, pp. Dostupné na: https://doi.org/10.3788/A0S202141.0131001. ZHANG, Zhe - YI, Shengzhen - HUANG, Qiushi - CHEN, Shenghao - LI, Wenbin - ZHANG, Zhong - WANG, Zhanshan. Research progress of normal-incidence optical system at extreme ultraviolet（EUV）wavelength. In Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2022-11-01, 30, 21, pp. 2678-2687. ISSN 1004924X. Dostupné na: https://doi.org/10.37188/OPE.20223021.2678. LI, Wenbin - LI, Shuhui - PAN, Liuyang - ZHANG, Zhe - XIE, Chun - HUANG, Qiushi - WANG, Zhanshan. Nanosecond extreme ultraviolet radiation damage on thin film mirrors. In Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2022-11-01, 30, 21, pp. 2698-2710. ISSN 1004924X. Dostupné na: https://doi.org/10.37188/OPE.20223021.2698. PAN, Liuyang - LI, Shuhui - CAO, Jinyu - WU, Jiali - ZHANG, Zhe - WANG, Kun - HUANG, Qiushi - MA, Bin - LI, Wenbin - WANG, Zhanshan. Ultrafast Time-Resolved Pump-Probe Investigation of Nanosecond Extreme Ultraviolet-Light-Induced Damage Dynamics on Binf4/infC/Ru Nano-Bilayer Film. In Nano Letters, 2022-07-13, 22, 13, pp. 5260-5268. ISSN 15306984. Dostupné na: https://doi.org/10.1021/acs.nanolett.2c01171. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2018 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1364/OE.26.019665 Pina Joao Rostohar Danijela 
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File name Access Size Downloaded Type License Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser.pdf available 3.9 MB 2 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2018 2017 3.356 Q1 1.519 Q1
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