Simulation and experimental study on developed profiles in the positive polymer resist PMMA

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Title	Simulation and experimental study on developed profiles in the positive polymer resist PMMA
Author	Koleva Elena
Co-authors	Vutova Katia
	Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID

Source document	Journal of Physics: Conference Series. Vol. 1089 (2018), art. no. 012015
Language	eng - English
URL	URL link
Document kind	rozpis článkov z periodík (rbx)
Category	ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2018
Registered in	SCOPUS
DOI	10.1088/1742-6596/1089/1/012015

article

	File name	Access	Size	Downloaded	Type	License
	Simulation and experimental study on developed profiles in the positive polymer resist PMMA.pdf	available	682 KB	0	Publisher's version

rok	CC	IF	IF Q (best)	JCR Av Jour IF Perc	SJR	SJR Q (best)	CiteScore
	N

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2018	2017			0.241	Q3

Number of the records: 1