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Simulation and experimental study on developed profiles in the positive polymer resist PMMA
Title Simulation and experimental study on developed profiles in the positive polymer resist PMMA Author Koleva Elena Co-authors Vutova Katia Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Source document Journal of Physics: Conference Series. Vol. 1089 (2018), art. no. 012015 Language eng - English URL URL link Document kind rozpis článkov z periodík (rbx) Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2018 Registered in SCOPUS DOI 10.1088/1742-6596/1089/1/012015 article
File name Access Size Downloaded Type License Simulation and experimental study on developed profiles in the positive polymer resist PMMA.pdf available 682 KB 0 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore N rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2018 2017 0.241 Q3
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