Effect of mask material on the side walls angle of boron doped diamond patterns etched in various types of plasma

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Title	Effect of mask material on the side walls angle of boron doped diamond patterns etched in various types of plasma
Author	Marton Marián
Co-authors	Ritomský Mário 1993- ^SCOPUS ^RID ^ORCID
	Řeháček V.
	Michniak P.
	Behúl Miroslav
	Redhammer R.
	Vojs M.

Source document	MME 2018 : 29th Micromechanics and Microsystems Europe Workshop : Booklet with full papers. P. 150-155. - Bratislava : Slovak University of Technology, Bratislava, 2018 / Hotový I. ; Mikolášek M. ; Predanocy Martin 1984- ; MME 2018 29th Micromechanics and Microsystems Europe Workshop
Language	eng - English
Country	SK - Slovak Republic
Document kind	rozpis článkov z periodík (rzb)
Category	AFD - Published papers from domestic scientific conferences
Year	2018

article

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2018

Number of the records: 1