Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma

Number of the records: 1

Title	Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma
Author	Marton Marián
Co-authors	Ritomský Mário 1993- SAVINFO - Ústav informatiky SAV ^SCOPUS ^RID ^ORCID
	Řeháček V.
	Michniak P.
	Behúl Miroslav
	Novák Patrik
	Vančo L.
	Vojs M.

Source document	Journal of Micromechanics and Microengineering. Vol. 29, no. 12 (2019), art. no. 124004, 9 p.
Language	eng - English
Document kind	rozpis článkov z periodík (rbx)
Category	ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2020
Registered in	WOS
Registered in	SCOPUS
Registered in	CCC
DOI	10.1088/1361-6439/ab4d6f

article

	File name	Access	Size	Downloaded	Type	License
	Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma.pdf	available	3 MB	0	Publisher's version

rok	CC	IF	IF Q (best)	JCR Av Jour IF Perc	SJR	SJR Q (best)	CiteScore
	A

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2019	2018	2.141	Q2	0.559	Q2

Number of the records: 1