High temperature operation of the MEMS piezoelectric pressure sensor based on AlGaN/GaN heterostructure

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Title	High temperature operation of the MEMS piezoelectric pressure sensor based on AlGaN/GaN heterostructure
Author	Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ^ORCID
Co-authors	Dzuba Jaroslav 1987
	Držík Milan
	Kutiš V.
	Kasemann S.
	Zehetner J.

Source document	. P. 33-36 Proceedings of the International Conference on Advances in Electronic and Photonic Technologies : ADEPT 2020. - Slovakia : University of Zilina in EDIS-Publishing Centre of UZ, 2020 / Kováč, jr. J. ; Chymo F. ; Feiler M. ; Jandura D. ; International Conference on Advances in Electronic and Photonic Technologies (ADPET 2020)
Language	eng - English
Document kind	rozpis článkov z periodík (rzb)
Category	AFD - Published papers from domestic scientific conferences
Year	2020

article

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2020

Number of the records: 1