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High temperature operation of the MEMS piezoelectric pressure sensor based on AlGaN/GaN heterostructure
Title High temperature operation of the MEMS piezoelectric pressure sensor based on AlGaN/GaN heterostructure Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Co-authors Dzuba Jaroslav 1987 Držík Milan Kutiš V. Kasemann S. Zehetner J. Source document . P. 33-36 Proceedings of the International Conference on Advances in Electronic and Photonic Technologies : ADEPT 2020. - Slovakia : University of Zilina in EDIS-Publishing Centre of UZ, 2020 / Kováč, jr. J. ; Chymo F. ; Feiler M. ; Jandura D. ; International Conference on Advances in Electronic and Photonic Technologies (ADPET 2020) Language eng - English Document kind rozpis článkov z periodík (rzb) Category AFD - Published papers from domestic scientific conferences Year 2020 article
File name Access Size Downloaded Type License High temperature operation of the MEMS piezoelectric pressure sensor based on AlGaN.pdf available 817.7 KB 0 Publisher's version rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2020
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