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Electron beam-plasma vacuum deposition of very thin carbon films on quartz

  1. TitleElectron beam-plasma vacuum deposition of very thin carbon films on quartz
    Author Huran Jozef 1955 SAVELEK - Elektrotechnický ústav SAV    ORCID
    Co-authors Balalykin Nikolay I.

    Skrypnik A.P.

    Sasinková Vlasta 1954- SAVCHEM - Chemický ústav SAV

    Nozdrin Mikhail A.

    Kováčová Eva 1966 SAVELEK - Elektrotechnický ústav SAV

    Shirkov G.D.

    Source document Proceedings of ADEPT 2021 : 9th International Conference on Advances in Electronic and Photonic Technologies, Podbanské, High Tatras, Slovakia. P. 13-16. - Žilina : Univ. Zilina in EDIS-Publishing Centre of UZ, 2021 / Jandura D. ; Maniaková P. ; Lettrichová I. ; Kováč Jaroslav Jr.
    Languageeng - English
    Document kindrozpis článkov z periodík (rzb)
    CategoryAFD - Published papers from domestic scientific conferences
    Year2021
    article

    article

    Názov súboruPrístupVeľkosťStiahnutéTypLicence
    Electron beam-plasma vacuum deposition of very thin carbon films on quartz.pdfPrístupný672.4 KB3Vydavateľská verzia
    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    2021
Number of the records: 1  

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