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Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory
Title Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory Author Kundrata Ivan SAVELEK - Elektrotechnický ústav SAV Co-authors Mošková Antónia 1958 SAVELEK - Elektrotechnický ústav SAV Moško Martin 1958 SAVELEK - Elektrotechnický ústav SAV ORCID Mičušík Matej 1977- SAVPOLYM - Ústav polymérov SAV ORCID Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV ORCID Fröhlich Karol 1954 SAVELEK ; SAVCEMEA - Elektrotechnický ústav SAV ORCID Source document Journal of Vacuum Science and Technology A. Vol. 39 (2021), no. 062407 Language eng - English Document kind rozpis článkov z periodík (rbx) Citations WEBER, M. - BOYSEN, N. - GRANIEL, O. - SEKKAT, A. - DUSSARRAT, C. - WIFF, P. - DEVI, A. - MUñOZ-ROJAS, D. Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It. In ACS MATERIALS AU. ISSN 2694-2461, APR 27 2023, vol. 3, no. 4, p. 274-298. Dostupné na: https://doi.org/10.1021/acsmaterialsau.3c00002. Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2021 Registered in WOS Registered in SCOPUS Registered in CCC DOI 10.1116/6.0001255 article
File name Access Size Downloaded Type License Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection.pdf available 3.4 MB 2 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2021 2020 2.427 Q3 0.583 Q2
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