Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory

Number of the records: 1

Title	Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory
Author	Kundrata Ivan SAVELEK - Elektrotechnický ústav SAV
Co-authors	Mošková Antónia 1958 SAVELEK - Elektrotechnický ústav SAV
	Moško Martin 1958 SAVELEK - Elektrotechnický ústav SAV ^ORCID
	Mičušík Matej 1977- SAVPOLYM - Ústav polymérov SAV ^ORCID
	Dobročka Edmund 1955 SAVELEK - Elektrotechnický ústav SAV ^ORCID
	Fröhlich Karol 1954 SAVELEK ; SAVCEMEA - Elektrotechnický ústav SAV ^ORCID

Source document	Journal of Vacuum Science and Technology A. Vol. 39 (2021), no. 062407
Language	eng - English
Document kind	rozpis článkov z periodík (rbx)
Citations	WEBER, M. - BOYSEN, N. - GRANIEL, O. - SEKKAT, A. - DUSSARRAT, C. - WIFF, P. - DEVI, A. - MUñOZ-ROJAS, D. Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It. In ACS MATERIALS AU. ISSN 2694-2461, APR 27 2023, vol. 3, no. 4, p. 274-298. Dostupné na: https://doi.org/10.1021/acsmaterialsau.3c00002.
Category	ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
Category of document (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
Year	2021
Registered in	WOS
Registered in	SCOPUS
Registered in	CCC
DOI	10.1116/6.0001255

article

	File name	Access	Size	Downloaded	Type	License
	Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection.pdf	available	3.4 MB	2	Publisher's version

rok	CC	IF	IF Q (best)	JCR Av Jour IF Perc	SJR	SJR Q (best)	CiteScore
	A

rok vydania	rok metriky	IF	IF Q (best)	SJR	SJR Q (best)
2021	2020	2.427	Q3	0.583	Q2

Number of the records: 1