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Characterization of thickness homogeneity of Si crystal membranes produced by single point diamond turning

  1. TitleCharacterization of thickness homogeneity of Si crystal membranes produced by single point diamond turning
    Author Zápražný Zdenko 1980 SAVELEK - Elektrotechnický ústav SAV    ORCID
    Co-authors Korytár Dušan 1950 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Zaťko Bohumír 1973 SAVELEK - Elektrotechnický ústav SAV    ORCID

    Gál Norbert 1990 SAVELEK - Elektrotechnický ústav SAV

    Jergel Matej 1954- SAVFYZIK - Fyzikálny ústav SAV    SCOPUS    RID    ORCID

    Halahovets Yuriy 1982- SAVFYZIK - Fyzikálny ústav SAV    ORCID

    Mazzolari A.

    Romagnoni M.

    Ferrari C.

    Source document Progress in applied surface, interface and thin film science – solar renewable energy news 2021. SURFINT – SREN VII : extended abstract book. P. 72-73. - Bratislava : Comenius Univ., 2021 / Brunner Róbert 1954
    Languageeng - English
    Document kindrozpis článkov z periodík (rzb)
    CategoryAFH - Abstracts of papers from domestic conferences
    Year2021
    article

    article

    rok vydaniarok metrikyIFIF Q (best)SJRSJR Q (best)
    2021
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