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Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments
Title Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments Author Zehetner J. Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Dohnal F. Izsák Tibor SAVELEK - Elektrotechnický ústav SAV ORCID Držík Milan Kromka A. Source document Proceedings of ADEPT 2022 : 10th International Conference on Advances in Electronic and Photonic Technologies, Tatranská Lomnica, High Tatras, Slovakia. P. 7-12. - Žilina : University of Zilina in EDIS-Publishing Centre of UZ, 2022 / Feiler M. ; Ziman M. ; Kováčová S. ; Kováč Jaroslav Jr. Language eng - English Country SK - Slovak Republic Document kind rozpis článkov z periodík (rzb) Category AFD - Published papers from domestic scientific conferences Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia Year 2022 
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File name Access Size Downloaded Type License Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments.pdf available 659.7 KB 3 Publisher's version rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2022
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