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Deposition parameter effects on niobium nitride (NbN) thin films deposited onto copper substrates with DC magnetron sputtering
Title Deposition parameter effects on niobium nitride (NbN) thin films deposited onto copper substrates with DC magnetron sputtering Author Leith S. Co-authors Vogel M. Jiang X.S. Seiler Eugen 1977 SAVELEK - Elektrotechnický ústav SAV ORCID Ries Rastislav SAVELEK - Elektrotechnický ústav SAV ORCID Pira C. Antoine C.Z. Katasevs A. Kaupuzs J. Medvids A. Onufrijevs P. Kugeler O. Malyshev O.B. Valizadeh R. Sublet A. Source document 19th International Conference on RF Superconductivity SRF 2019. P. 947-951. - Dresden : JACoW Publ, 2019 Document kind rozpis článkov z periodík (rzb) Citations LIU, Y. - ZHANG, X.Y. - TU, M.H. - HU, Y. - WANG, H. - ZHANG, J. - LI, Z.G. - ZENG, X.M. - WAN, Q. - VASILIY, P. - YANG, B. Structure and mechanical properties of multi-principal-element (AlCrNbSiTi)N hard coating. In SURFACE & COATINGS TECHNOLOGY. ISSN 0257-8972, MAR 15 2022, vol. 433. Dostupné na: https://doi.org/10.1016/j.surfcoat.2022.128113. Category AFC - Published papers from foreign scientific conferences Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia Year 2019 
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rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2019
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